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Stiffness testing device for gas bearing

A technology of air bearing and testing device, which is applied in the direction of mechanical bearing testing, etc., can solve the problems of insufficient flexibility and difficulty of the performance testing bench, and achieve the effect of reliable testing results and simple operation.

Active Publication Date: 2014-02-19
SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD
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  • Abstract
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AI Technical Summary

Problems solved by technology

[0007] A kind of stiffness measuring device of the air bearing of prior art is Zhang Jun'an in " high stiffness static pressure bearing research " (Northwestern Polytechnical University, December, 2006) mentioned " the performance test bench of gas static pressure thrust bearing ", the performance test bench uses spherical pair contact, and it is necessary to find the absolute center of the tested component, which is difficult in actual operation; in addition, the performance test bench is not flexible enough, and can only test the stiffness of a single air bearing

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  • Stiffness testing device for gas bearing
  • Stiffness testing device for gas bearing
  • Stiffness testing device for gas bearing

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Embodiment Construction

[0030] The following will combine Figure 1 ~ Figure 4 The stiffness testing device of the air bearing of the present invention is further described in detail.

[0031] see Figure 1 ~ Figure 3 The stiffness testing device of the air bearing of the present invention comprises a platform 1, a guide rail positioning block 2, a guide rail 3, a display instrument 4, at least a loading mechanism 5, at least a gantry 6 and an inductance micrometer (in the figure not shown);

[0032] The guide rail 3 is arranged on the upper surface of the platform 1 through the guide rail positioning block 2;

[0033] The gantry 6 is installed on the platform 1;

[0034] The loading mechanism 5 is installed on the gantry 6 in a direction perpendicular to the horizontal plane or in a direction parallel to the horizontal plane;

[0035] The display instrument 4 is connected with the loading mechanism 5;

[0036] The component under test 8 is arranged on the upper surface of the platform 1, the bo...

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Abstract

The invention discloses a stiffness testing device for gas bearing, which comprises a platform, a display instrument, a loading mechanism and a portal frame; a measured assembly is arranged on the upper surface of the platform, the upper surface of the platform is an air floating surface, and the gas bearing is formed between the measured assembly and the platform; the portal frame is arranged on the platform; the loading mechanism is arranged on the portal frame and used for exerting a loading force on the measured assembly; and the display instrument is connected with the loading mechanism, and the display instrument carries out real-time display on the loading force exerted by the loading mechanism. By using the stiffness testing device for gas-lubricated bearings disclosed by the invention, the stiffness of a single gas bearing and the stiffness of combined gas bearings can be tested; and the stiffness testing device is simple in operation.

Description

technical field [0001] The invention relates to air bearing technology, in particular to a stiffness testing device for air bearings. Background technique [0002] Air-bearing support technology is widely used in the field of micromachining technology. Air bearings can meet the requirements of high precision, high speed, high resolution, good thermal stability, low vibration, small crawling, less pollution and cost reduction proposed in the field of micromachining technology. It is a key component of the micro-measurement and processing system. Air-floating support technology is one of the key technologies in lithography machine manufacturing engineering, and is the key support technology to realize high-precision scanning lithography. [0003] An air bearing can be defined as two finished surfaces separated by an air film, and these two finished surfaces are called air bearing surfaces. [0004] The commonly used performance parameters of air bearings mainly include beari...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01M13/04
Inventor 贾海立朱岳彬韩良华王茜
Owner SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD
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