GUI (Graphical User Interface) platformization realization method orienting to IC (Integrated Circuit) equipment control software

A technology for controlling software and implementing methods, applied in the direction of program control design, program control device, software engineering design, etc., can solve the problems of poor software versatility, achieve the effect of guaranteeing requirements, perfecting communication, and improving the level of automation

Active Publication Date: 2012-05-16
SHENYANG INST OF AUTOMATION - CHINESE ACAD OF SCI
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Problems solved by technology

[0005] Aiming at the deficiencies such as poor product software versatility in semiconductor equipment in the prior art, the technical problem to be solved by the present invention is to provide a GUI platform-based implementation method for IC equipment control software with strong versatility and flexible configuration

Method used

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  • GUI (Graphical User Interface) platformization realization method orienting to IC (Integrated Circuit) equipment control software
  • GUI (Graphical User Interface) platformization realization method orienting to IC (Integrated Circuit) equipment control software
  • GUI (Graphical User Interface) platformization realization method orienting to IC (Integrated Circuit) equipment control software

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Embodiment Construction

[0051] The present invention will be described in further detail below in conjunction with the accompanying drawings.

[0052] The present invention is oriented to the GUI platform realization method of IC equipment control software and comprises the following steps:

[0053] 1) Develop corresponding IC device driver modules according to the characteristics of IC devices from different manufacturers.

[0054] This embodiment takes the DeviceNet PLC controller as an example. The controller integrates all the required control data of the IC equipment. In order to read and write the data of the controller and complete the production needs, the IC device driver module of the controller is developed according to the DeviceNet protocol. First establish the DeviceNet client object, then construct the DeviceNet protocol request data packet, send the read operation request command to the controller, the controller returns the response data according to the request, and the IC device dr...

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Abstract

The invention relates to a GUI (Graphical User Interface) platformization realization method orienting to IC (Integrated Circuit) equipment control software. The GUI platformization realization method comprises the following steps of: developing corresponding IC equipment driving modules and drawing a GUI platform interface according to the characteristics of IC equipment of different manufacturers; connecting a monitoring host and a controller of the IC equipment by using the IC equipment driving modules to form a communication network; reading data in the controller by the IC equipment driving modules and mapping the data onto a general data layer of a GUI platform; and performing display, control and exception handling on the data in real time by the GUI platform interface by using the data layer, thereby realizing the GUI platformization of the IC equipment control software. According to the invention, a cross-platform mechanism is realized, the cluster monitoring capacity of wafer manufacturing equipment is enhanced, the requirements of the user on flexibly configuring a human-computer interface of a corresponding control system can be met, the entire production process is ensured to be rapidly configured in a short time, and thus, the requirement for starting the production in advance is guaranteed.

Description

technical field [0001] The invention belongs to configuration monitoring and communication technology, in particular to a GUI platform realization method for IC equipment control software. Background technique [0002] At present, domestic semiconductor manufacturers have invested in wafer processing technology using IC (integrate circuit, integrated circuit) equipment. The wafer diameter is 12 inches. The wafer production process is becoming more and more complicated, and many production equipment may come from different equipment manufacturing. Manufacturers, this brings difficulties to the upper-level man-machine GUI (Graphical User Interface, Graphical User Interface) interaction and production management. Especially for the interaction of man-machine GUI interface, for different equipment manufacturers and users, new application programs have to be redeveloped every time. This hinders the acceleration of commercial production, and cannot meet the needs of the productio...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G06F9/44
CPCG06F9/45558G06F2009/45575G06F9/44G06F8/00G06F8/38G06F2009/4557
Inventor 于海斌徐皑冬刘明哲李正王锴金妮张吉龙
Owner SHENYANG INST OF AUTOMATION - CHINESE ACAD OF SCI
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