Small long light path infrared gas sensor module

A gas sensor, long optical path technology, used in instruments, scientific instruments, material analysis by optical means, etc., can solve problems such as unfavorable long optical path and large light dispersion.

Inactive Publication Date: 2012-06-13
上海芯敏微系统技术有限公司
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  • Claims
  • Application Information

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Problems solved by technology

In these designs, the light emitted by the infrared light source has a large dispe...

Method used

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  • Small long light path infrared gas sensor module
  • Small long light path infrared gas sensor module
  • Small long light path infrared gas sensor module

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Embodiment Construction

[0017] Now, in combination with the accompanying drawings, take the small-sized long optical path infrared gas sensor module of an "M" shaped cavity formed by three rounds of cylindrical converging reflection inside the optical cavity / gas chamber as an example.

[0018] figure 1 A schematic diagram of the decomposition structure of the present invention is given, wherein the multi-reflection M-shaped optical cavity / air chamber includes two parts: the upper cover 3 of the cavity and the lower cover 5 of the cavity, and the upper and lower covers of the cavity are snapped together to form the infrared gas sensor module Optical Cavity / Gas Chamber. The inner surface finish of the upper cover 3 of the optical cavity and the lower cover 5 of the optical cavity shall not be less than 0.08, and the outer surface shall not be less than 6.4; The reflectivity is not lower than 95% requirement.

[0019] figure 2 A schematic diagram of the structure of the upper cover of the optical ca...

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Abstract

The present invention relates to a small long light path infrared gas sensor module. The module mainly comprises an infrared light source (2), a thermopile detector (6), an optical cavity/gas chamber, an infrared light source power supply lead wire connecting plate (1), a detector signal lead wire connecting plate (8), and a main circuit board (7). The optical cavity is a multiple reflection structure, and comprises two parts of a cavity upper cover (3) and a cavity lower cover (5). The power source is connected with the infrared light source (2) through the connecting plate (1) by the main circuit board (7). The main circuit board (7) receives a detection signal of the thermopile detector (6) through the connecting plate (8), and performs the treatments of completion of infrared light source modulation, simulation of signal filtering amplification, same period sampling, and data processing and output. According to the present invention, after the infrared light emitted by the infrared light source (2) is collimated by a parabolic surface, and then is subjected to a plurality of cylindrical surface convergence reflections and an inclined plane convergence reflection, the infrared light reaches the surface of the detector (6), such that a plurality of the reflections are completed in the small area to achieve a long light path so as to realize the miniaturization of the high resolution infrared gas sensor.

Description

technical field [0001] The invention relates to a small-sized long optical path infrared gas sensor module, which is an infrared gas sensor used for gas detection and monitoring. Background technique [0002] At present, the optical cavity of existing infrared gas sensors mostly adopts a straight optical path and a simple folded optical path. In order to achieve a longer optical path, the optical cavity is generally relatively large, resulting in a long optical path and high sensitivity infrared gas sensor. , It is not conducive to carrying around, realizing the portability of high-performance infrared gas sensors, and cannot meet the requirements of portability detection in some occasions. [0003] For this reason, people have been devoting themselves to the research of small volume, long optical path, high sensitivity and portable infrared gas sensor. [0004] In terms of small area and long optical path design, US Patent US 7609375 discloses a gas sensor cavity. The ligh...

Claims

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Application Information

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IPC IPC(8): G01N21/17G01N21/01
Inventor 张永怀刘延祥李铁
Owner 上海芯敏微系统技术有限公司
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