Thin film temperature measurement method based on ellipsometer
A measurement method and technology of film temperature, applied in the direction of thermometers, thermometers, measuring devices, etc. with physical/chemical changes, can solve problems such as powerlessness, and achieve the effect of high measurement accuracy
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example 1
[0021] Example 1: Thin film growth temperature measurement, i.e. non-real-time temperature measurement [[ix]]
[0022] The ZnO film was prepared by ALD (Atomic Layer Deposition) method, using diethyl zinc (DEZn) as the metal source, and water as the oxygen source. The two sources are alternately fed into the reaction chamber, and the reaction equation is:
[0023] ZnOH*+Zn(CH 2 CH 3 ) 2 → ZnOZn(CH 2 CH 3 )*+C 2 h 6 (2)
[0024] Zn(CH 2 CH 3 )*+H 2 O → ZnOH*+C 2 h 6 (3)
[0025] Each reaction step is a saturated surface reaction, and two steps constitute a cycle. In the present invention, the access times of various sources are respectively DEZn:N 2 :H 2 O:N 2 =0.5s:2s:0.5s:2s.
[0026] The standard temperature-refractive index spectrum of ZnO thin film measured by Sopra GES-5E type ellipsometer is as follows figure 2 shown.
[0027] From figure 2 It can be seen that different temperatures do have an impact on the refractive ...
example 2
[0035] Example 2: Real-time temperature measurement of thin films [[x]]
[0036] SiO grown by thermal evaporation x / SiO 2 (1[5] Measure the refractive index spectrum of the thin film. The difference from Example 1 is that Example 2 does not change the growth temperature of the sample film, but changes the temperature of the film during the measurement. This temperature will also have an impact on the physical properties of the film, directly resulting in the refractive index spectrum measured by the ellipsometer changes so that the method of the invention can be applied. Its refractive index spectrum fitted by computer is as follows Figure 4 shown.
[0037] The temperature sampling interval of the standard refractive index spectrum is about 50 o C. It can be seen from the figure that the curves are clearly distinguished after the wavelength of 290 nm, so there is a high degree of confidence when matching with the least squares method. However, since the temperature s...
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