Optical element surface defect detecting system based on active laser beam scanning

Abstract

The invention discloses an optical element surface defect detecting system based on active laser beam scanning. In the detecting system, relative movement is not performed between a to-be-monitored optical element and an optical maser, a guide lens, and a photoelectric probe; point-by-point scanning for the surface of the optical element can be realized only through the two-dimensional rotation of the guide lens; the position of the focal point of a laser beam can be changed in real time during scanning, so that the focal point can always fall on the surface of the optical element. The system can realize on-line monitoring of the optical element in a highlight irradiation environment, a high-vacuum environment and a confined space in a high-power solid laser device. The system disclosed by the invention has simple structure and wide application range, and is flexible to use.

Description

technical field [0001] The invention belongs to the field of optoelectronics. In particular, it relates to a detection system for surface defects of optical components based on active scanning of laser beams. It is especially suitable for on-line monitoring of surface defects of large-diameter optical components in high-power solid-state laser devices. Background technique [0002] At present, there are many methods that can detect surface defects. The commonly used methods include microscopic measurement, laser spectrum method, coherent filter imaging method, dark field imaging method, etc. developed in recent years. These detection methods can achieve higher detection accuracy. Accuracy, the measurement effect is better when used for offline detection. However, because the high-power solid-state laser device has a complex application environment, on the one hand, the interior of the optical transmission channel is mostly irradiated with strong light or high vacuum; In ...

AI Technical Summary

Problems solved by technology

However, because the high-power solid-state laser device has a complex application environment, on the one hand, the interior of the optical transmission channel is mostly irradiated with strong light or high vacuum; In the light area, the use of surface defect detection equipment in such an environment is difficult to install the equipment, and secondly, improper use will easily pollute the laser device and cause damage to the monitoring equipment.

The above methods are difficult to meet the actual needs of on-line monitoring of surface defects of large-aperture optical components in high-power solid-state laser devices

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