Scanning probe microscopy and motion detection device thereof
A technology of motion detection and mirror, which is applied in the field of microscopy, can solve the problems that are not easy to realize, and achieve the effect of reducing optical interface and interference noise
Inactive Publication Date: 2012-06-20
邹海英
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Problems solved by technology
If you want to align the two parts of the optical fiber 143, you need to align the cores of the two parts of the optical fiber, and it is not easy to align the cores with a diameter of 5 μm to 10 μm.
In addition, doing so also introduces an optical interface, which in turn causes additional interfering noise
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[0026] In order to make the above objects, features and advantages of the present invention more comprehensible, the present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments.
[0027] The term "one embodiment" or "embodiment" here refers to that specific features, structures or characteristics related to the embodiment can be included in at least one implementation of the present invention. The appearances of "in one embodiment" in various places in this specification do not necessarily all refer to the same embodiment, nor do they necessarily refer to a separate or selected embodiment that is mutually exclusive of other embodiments. Furthermore, the order of blocks in a method, flowchart, or functional block diagram representing one or more embodiments does not necessarily refer to any particular order nor constitute a limitation on the invention.
[0028] image 3 It is a structural schematic diagram ...
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The invention discloses a motion detection device and a scanning probe microscopy adopting the same. The motion detection device comprises a photoelectric sensor, a laser generator, a first reflector, a second reflector and an optical fiber or an optical fiber component having a first end and a second end, wherein laser from the laser generator is projected to the first end of the optical fiber or the optical fiber component through the first reflector; partial laser is emitted into the optical fiber or the optical fiber component through the first end, and partial layer is reflected to the second reflector and reflected by the second reflector; the laser emitted into the optical fiber or the optical fiber component is projected to a detection target through the second end of the optical fiber or the optical fiber component, and reflected back into the optical fiber or the optical fiber component through the detection target; and the laser reflected by the detection target is projected to the photoelectric sensor through the first end of the optical fiber or the optical fiber component. Therefore, the weak motion of the detection target can be detected by using the laser.
Description
【Technical field】 [0001] The invention relates to the field of microscopes, in particular to a scanning probe microscope (Scanning probe microscope, SPM) and a motion detection device thereof. 【Background technique】 [0002] Scanning probe microscopy (SPM) is a general term for all microscopes that mechanically use a probe to scan and move on a sample to detect a sample image. The image resolution depends mainly on the size of the probe (usually in the nanometer range ). The scanning probe microscope includes atomic force microscope (atomic force microscope, AFM) and scanning tunneling microscope (scanning tunneling microscope, abbreviated as STM) and other microscopes. [0003] The atomic force microscope is an analytical instrument that can be used to study the surface structure of solid materials including insulators. It mainly includes a cantilever with a probe (probe) with a sharp tip, a cantilever motion detection device, a monitoring It consists of the feedback loop...
Claims
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IPC IPC(8): G01Q20/02
Inventor 何继中
Owner 邹海英