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Digitalized detection method for temperature information of micromechanical quartz gyroscope sensitive device

A technology of micro-mechanical gyroscope and temperature information, which is applied in the direction of speed measurement, gyroscope/steering sensing equipment, etc., with thermometers and gyro effects that are directly sensitive to heat, and can solve the effects of accuracy, poor consistency, and tuning forks. The nature of Vk is not completely consistent, etc., to achieve the effect of improving real-time performance and accuracy, improving accuracy and flexibility

Inactive Publication Date: 2012-06-27
BEIJING INSTITUTE OF TECHNOLOGYGY
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Problems solved by technology

But the disadvantage of this method is that, based on the working principle of the quartz tuning fork, the change of temperature and Vk is only an approximate linear change, which is a nonlinear curve. image 3 This non-linear relationship can also be seen in
Moreover, the nature of the relationship between the temperature and Vk of different tuning forks is not completely consistent
Therefore, the two limitations of the appeal method are: because the analog circuit cannot obtain the nonlinear information of the change, the linear method of this method can obtain the temperature information, but the accuracy is affected; in addition, due to the different properties of different tuning forks Completely consistent, debugging analog circuits requires a lot of work, and the consistency is poor

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  • Digitalized detection method for temperature information of micromechanical quartz gyroscope sensitive device

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Embodiment

[0085] Using the temperature measurement method of the present invention, in the temperature range of -20 degrees to 80 degrees, the g values ​​at different temperatures were measured, and the formula (13) was used to obtain the first-order, second-order, and third-order fitting respectively. temperature value. Figure 7 , Figure 8 , Figure 9 represent the fitting results, respectively.

[0086] The first-order fitting is expressed as T(g)=p1*g+p2; calculated by the least square method, p1=15.96, p2=8241;

[0087] The second-order fitting is expressed as T(g)=p1*g 2 +p2*x+p3. Calculated by the least square method, p1=0.0385, p2=13.65, p3=8237;

[0088] The third-order fitting is expressed as T(g)=p1*g 3 +p2*g 2 +p3*g+p4. Calculated by the least square method, p1=5.436*10 -8 , p2=-0.001437, p3=12.7, p4=-3.751*10 4 .

[0089] It can be seen from the test results that the effect of the third-order fitting is ideal, that is, the temperature information can be accurate...

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Abstract

The invention relates to a digitalized detection method for the temperature information of a micromechanical quartz gyroscope sensitive device, belonging to the fields of inertial sensor devices and signal processing. The digitalized detection method comprises the steps of: establishing a closed-loop driving module composed of a quartz tuning fork, an analog circuit, an ADC (Analog to Digital Converter), a DAC (Digital to Analog Converter) and a digital signal processing unit, generating sinusoidal signals close to resonant frequency by adopting a digital signal processing method, driving thequartz tuning fork to work, feeding back and compensating to make a tuning fork work at a fixed-amplitude state, detecting voltage quantity after a driving signal is subjected to the current voltage transformation of the turning fork, and reflecting temperature information by utilizing a amplitude variation factor g of the voltage quantity. According to the invention, the precision and the flexibility of the quartz tuning fork gyroscope in temperature compensation can be obviously increased; hardware do not need to be changed for the tuning forks of different properties, and a calibration coefficient is only need to provide in an algorithm; and if a user do not need to be provided with temperature, the amplitude variation factor g can be directly applied inside a digital signal processingunit to carry out temperature compensation, and additional devices do not need to be added.

Description

technical field [0001] The invention relates to a digital detection method for temperature information of a sensitive device of a quartz micromachined gyroscope, and belongs to the fields of inertial sensor devices and signal processing. Background technique [0002] Quartz micromachined gyroscope is a kind of MEMS inertial measurement device that has been gradually developed in the past two decades. It is used for angular velocity measurement. Quartz tuning fork gyroscope has the advantages of small size, light weight, high reliability and low price. [0003] Quartz micromachined gyroscopes have high environmental requirements in engineering applications, but temperature changes have a great impact on the performance of the device. At present, temperature compensation technology is used in many products. In the temperature compensation circuit, the temperature information is the basis of the compensation algorithm, and it is necessary to obtain the temperature information o...

Claims

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Application Information

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IPC IPC(8): G01K7/00G01C19/5614
Inventor 冯立辉王健孙雨南张志雄崔芳
Owner BEIJING INSTITUTE OF TECHNOLOGYGY
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