Device and method for measuring thickness of conductor membrane

A technology of measuring device and conductor film, applied in electromagnetic measuring device, electric/magnetic thickness measurement, etc., can solve the problems of high reliability and stability requirements, surface damage of conductor film, complicated signal processing, etc., to simplify the signal Processing, fast measurement, the effect of simplifying the measurement process

Active Publication Date: 2012-07-04
TSINGHUA UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The four-point probe method will cause damage to the surface of the conductor film
The eddy current method measures the thickness of the conductor film through the impedance change, inductance

Method used

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  • Device and method for measuring thickness of conductor membrane
  • Device and method for measuring thickness of conductor membrane
  • Device and method for measuring thickness of conductor membrane

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Embodiment Construction

[0026] Embodiments of the present invention are described in detail below, examples of which are shown in the drawings, wherein the same or similar reference numerals designate the same or similar elements or elements having the same or similar functions throughout. The embodiments described below by referring to the figures are exemplary only for explaining the present invention and should not be construed as limiting the present invention.

[0027] In describing the present invention, it should be understood that the terms "longitudinal", "transverse", "upper", "lower", "front", "rear", "left", "right", "vertical", The orientation or positional relationship indicated by "horizontal", "top", "bottom", "inner", "outer", etc. are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than Nothing indicating or implying that a referenced device or elem...

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Abstract

The invention discloses a device and method for measuring the thickness of a conductor membrane. The device for measuring the thickness of the conductor membrane comprises an eddy current sensor, a force transducer, a front signal processing module and a data acquisition module, wherein the force transducer is connected with the eddy current sensor, and is used for measuring the magnitude of the electromagnetic force of the conductor membrane on the eddy current sensor; the front signal processing module is connected with the eddy current sensor, and is used for inputting alternating current with a preset frequency to the eddy current sensor; the front signal processing module is connected with the force transducer, and is used for acquiring a measuring signal of the force transducer and converting the measuring signal into an analog electric signal; and the data acquisition module is connected with the front signal processing module, and is used for acquiring the analog electric signal provided by the front signal processing module when the alternating current is on a preset phase and converting the analog electric signal into a digital signal. According to the measuring device disclosed by the embodiment of the invention, the thickness of the conductor membrane can be measured easily, conveniently and quickly.

Description

technical field [0001] The invention relates to a measuring device for the thickness of a conductor film and a method for measuring the thickness of a conductor film using the measuring device. Background technique [0002] Currently, methods for measuring the thickness of a conductor film include a four-point probe method, an eddy current method, an X-ray absorption method, and an X-ray fluorescence method. The four-point probe method causes damage to the surface of the conductor film. X-ray absorptiometry and X-ray fluorescence are radioactive, so they are not suitable for application in general environments. The eddy current method measures the thickness of the conductor film through the impedance change, inductance change or Q value change of the single-frequency eddy current sensor, but there are defects such as complicated subsequent signal processing and high requirements for reliability and stability. Contents of the invention [0003] The present invention aims ...

Claims

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Application Information

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IPC IPC(8): G01B7/06
Inventor 赵乾孟永钢余强路新春
Owner TSINGHUA UNIV
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