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Test correction method and apparatus of thin film display device

A display element and film technology, applied in electrical components, measuring devices, optical devices, etc., can solve problems such as increase correction failure, position offset, OLED panel movement, etc.

Inactive Publication Date: 2012-07-18
HITACHI HIGH-TECH CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, there is a problem that the OLED panel cannot be moved to the desired position due to the misalignment that occurs when the OLED panel is turned over, the movement error of the stage, etc., and the position for laser irradiation is shifted, and the number of correction failures increases.

Method used

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  • Test correction method and apparatus of thin film display device
  • Test correction method and apparatus of thin film display device
  • Test correction method and apparatus of thin film display device

Examples

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Embodiment Construction

[0048] An example of embodiment of the present invention will be described with reference to the drawings.

[0049] Figure 8 It is a block diagram showing the general configuration of the FPD inspection and correction device 100 according to one embodiment of the present invention. exist Figure 8 Among them, the FPD inspection and correction device 100 includes a lighting inspection unit 101 , an inspection and correction unit 102 , a loader (loader) 103 , and a system control unit 104 , and the inspection and correction unit 102 further includes a defect inspection unit 105 and a correction unit 106 .

[0050] The FPD inspection and correction device 100 of this embodiment, firstly, the defect is detected from the transparent electrode side through the lighting inspection of the OLED substrate 1 by the lighting inspection part 101, and its position information is stored in the system control part 104, and then, via loading The device 103 transports the OLED substrate afte...

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PUM

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Abstract

The invention provides a correction method and a correction device for checking a film display element, wherein even under the condition that the OLED panel, the single-wavelength inspection and correction can be realized with high reliability so as to improving the yield. During the checking on the light emitting device of a film display element with a metal electrode film formed on a light-emitting layer and a transparent electrode film formed on the opposite surface, the method for correcting the defective part and the device thereof are configured in that the metal electrode and the transparent electrode are applied with electric power to enable the light emitting layer to emit light. Observing the light emitting device of the light-emitting layer from the transparent electrode side opposite to the metal electrode side, the part of the light-emitting layer that does not emit light is detected. According to the detected position information that does not emit light, the metal electrode is irradiated with a laser beam at one side opposite from the transparent electrode, so that the metal electrode film above the position that does not emit light is removed.

Description

technical field [0001] The present invention relates to the inspection and correction method and inspection and correction device for inspecting the non-lighting pixels of FPD and correcting the non-lighting pixels, in particular to the inspection of thin-film display elements such as OLED panels, and the inspection and correction method and inspection for integrated thin-film display elements Correction device. Background technique [0002] OLED (Organic Light Emitting Diode) panels used in organic EL (Electro Luminescence) display devices and lighting devices, which are a type of FPD (Flat Panel Display), are classified into top emission (top emission) and Bottom emission (bottom emission) type two, top emission type is generally figure 1 Panel construction shown. That is, in the top emission type, a TFT layer (Thin Film Transistor) 802 is formed on a glass substrate 801, a transparent electrode 803, an organic light-emitting layer 804, a metal electrode 805, and an insu...

Claims

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Application Information

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IPC IPC(8): H01L51/56G01B11/00G01N21/88
CPCG01R31/2635
Inventor 中尾敏之丸山重信片冈文雄
Owner HITACHI HIGH-TECH CORP