MEMS (micro-electromechanical system) thermal-type flow sensor

A thermal flow sensor technology, applied in the field of flow sensors, can solve problems such as air flow disorder and affect the accuracy of detection results, and achieve the effects of enhanced anti-pollution ability, long service life, and elimination of measurement errors

Inactive Publication Date: 2012-08-01
郑州炜盛电子科技有限公司
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Problems solved by technology

[0003] In actual production, the flow sensing chip of the MEMS thermal flow sensor is usually directly pasted on the inner wall of the fluid channel for flow detection. However, the flow sensing chip is directly pasted on the inner wall of the fluid channel so that the flow sensing chip is relatively There is a certain protruding problem, that is, the flow sensing chip and the fluid channel form a step difference, which makes the detected air flow easily turbulent, thereby affecting the accuracy of the detection result

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Embodiment Construction

[0011] The technical solutions of the present invention will be described in further detail below through specific implementation methods.

[0012] Such as figure 1 Shown, a kind of MEMS thermal flow sensor, it comprises MEMS thermal flow sensing chip 2 and fluid channel 1; Wherein, described fluid channel 1 has the side inner wall of groove is smooth plane inner wall; Described fluid channel The inner wall 3 of 1 is provided with a groove, and the shape and size of the groove match the shape and size of the MEMS thermal flow sensing chip 2; the MEMS thermal flow sensing chip 2 is mounted on the In the groove, the sensitive surface of the MEMS thermal flow sensing chip 2 is flush with the surface of the inner wall 3 of the fluid channel 1; it should be noted that, in other embodiments, the groove can also be A slot is used to install the MEMS thermal flow sensing chip 2 from the outside of the fluid channel 1 .

[0013] Mount the same MEMS thermal flow sensing chip in the sa...

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Abstract

The invention provides an MEMS (micro-electromechanical system) thermal-type flow sensor, which comprises an MEMS thermal-type flow sensing chip and a fluid passage. A groove is arranged on the inner wall of the fluid passage, the MEMS thermal-type flow sensing chip is installed in the groove, the sensitive side of the MEMS thermal-type flow sensing chip is flush with the surface of the inner wall of the fluid passage, and the fluid passage is a pipeline which has a smooth inner wall and a square transverse section. The MEMS thermal-type flow sensor has the advantages of simple structure, low cost, implementing easiness, outstanding effect and high accuracy of detection results.

Description

technical field [0001] The invention relates to a flow sensor, in particular to a MEMS thermal flow sensor. Background technique [0002] Thermal flow sensors manufactured using MEMS processing technology on semiconductor substrates such as silicon are usually called MEMS thermal flow sensors. This type of semiconductor thermal flow sensor usually forms a heating resistor on a thin-film semiconductor substrate with a thickness of several microns. and temperature-sensing elements; because the sensor adopts a thin-film structure, it has the advantages of small heat capacity, high-speed response, and low-voltage drive; in addition, the sensor adopts MEMS processing technology, and it is easy to form a heating resistor and a temperature-sensing element , which is conducive to the detection of temperature difference between upstream and downstream, and is conducive to the discrimination of forward flow and reverse flow. [0003] In actual production, the flow sensing chip of the...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01F1/684
Inventor 张小水刘建钢王书潜祁明锋
Owner 郑州炜盛电子科技有限公司
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