Distorted Dammann grating and system for simultaneously imaging multiple object planes
A technology of Damman grating and imaging system, applied in diffraction grating, optics, optical components, etc., can solve problems such as uneven energy distribution
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[0026] 1. Theoretical design
[0027] 1. Design of twisted Damman grating
[0028] The twisted Damman grating proposed by the present invention introduces the idea of Damman coding into the twisted Damman grating. Essentially, this twisted Damman grating is a computer hologram. Its transmittance function can be expressed as
[0029]
[0030] Among them, (x, y) is the Cartesian coordinate system on the normalized entrance pupil plane. α=arcsin(NA / n 0 ) is the maximum aperture angle, where NA is the numerical aperture of the focusing objective lens, n 0 is the refractive index of the objective lens back field. W 20 is the defocus factor, which represents the base defocus amount corresponding to the zero-order diffraction order. Λ 0 is the grating period along the transverse direction at the center of the twisted Damman grating aperture. C m is the coefficient corresponding to the mth diffraction order, which can be written as:
[0031] C ...
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