Sensor integrated with light waveguides and micro-cavities based on light intensity detection
A technology for integrating optical waveguides and sensors, applied in the field of optical sensing, can solve the problems of demanding sensor technology and achieve the effects of process compatibility, easy integration, and simple design
Inactive Publication Date: 2012-08-15
INST OF SEMICONDUCTORS - CHINESE ACAD OF SCI
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This makes the preparation of the sensor very demanding on the process
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[0055] refer to figure 1 , the present invention is a sensor coupled based on a 3dB optical beam splitter and an optical microring, comprising a first 3dB optical beam splitter 1, a second 3dB optical beam splitter 2, a 2×1 optical beam combiner 5, a Sensing microring 3 , a reference microring 6 and a sample groove 4 . Wherein the sensing microring 3 is located in the sample groove 4 .
[0056] Taking the SOI material as an example, the cross-sectional size of the waveguide is 220nm×500nm, the radius of the reference microring 6 is 150 μm, and the radius of the sensing microring 3 is 149.13 μm.
[0057] refer to figure 2 , when the measured substance is pure deionized water (refractive index 1.33), since the structure and effective refractive index of the reference microcavity 6 and the sensing microcavity 3 are slightly different, the sensing microcavity 3 and the reference microcavity The free spectral widths of 6 are not equal. In order to reduce the cost of the sensin...
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Abstract
A sensor integrated with light waveguides and micro-cavities based on light intensity detection comprises a first 3dB light beam splitter, a second 3dB light beam splitter, a sensing micro-cavity, a sample groove, a 2X1 light beam combiner and a reference micro-cavity. A light input waveguide of the second 3dB light beam splitter is connected with a second output waveguide of the first 3dB light beam splitter; one side of the sensing micro-cavity is coupled with a first light output waveguide of the second 3dB light beam splitter; the sample groove is used for holding the sensing micro-cavity; the 2X1 light beam combiner comprises a first input light waveguide, a second input light waveguide and an output light waveguide, and the first input light waveguide of the 2X1 light beam combiner is coupled with the other side of the sensing micro-cavity; one side of the reference micro-cavity is coupled with a second light output waveguide of the second 3dB light beam splitter, and the other side of the reference micro-cavity is coupled with the second input light waveguide of the 2X1 light beam combiner; and the ratio of output light intensity of the output light waveguide of the 2X1 light beam combiner to output light intensity of a first output waveguide of the first 3dB light beam splitter is used as a final sensing signal.
Description
technical field [0001] The invention relates to the field of light sensing, in particular to an integrated optical waveguide microcavity biochemical sensor based on light intensity detection. Background technique [0002] Biological and chemical sensors have been widely used in various fields such as aerospace, aviation, national defense, science and technology, and industrial and agricultural production. Optical sensor is an important part of sensing technology. Its basic principle is: the measured substance interacts with the light field, so that some parameters of the light field (such as wavelength, phase, polarization, light intensity, etc.) change. [0003] Integrated optical waveguide sensors have the advantages of anti-electromagnetic interference, resistance to harsh environments (such as high temperature, nuclear radiation, etc.), good selectivity, high sensitivity, fast response, and easy integration. They are widely used in clinical medicine, bioengineering, food...
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IPC IPC(8): G01N21/41
Inventor 张晓光吴远大王玥张家顺安俊明王红杰李建光胡雄伟
Owner INST OF SEMICONDUCTORS - CHINESE ACAD OF SCI