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Processing method for process waste water from preparation of silicon wafer

A treatment method and technology of silicon wafers, which are applied in the fields of energy wastewater treatment, water/sewage multi-stage treatment, water/sludge/sewage treatment, etc., and can solve problems such as unknown

Inactive Publication Date: 2012-09-05
陈秋美
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

The embodiment of the previous case only used glucose and sodium acetate as the artificial matrix to carry out the experiment. The treatment method of the previous patent has no effect on the silicon wafer slicing and polishing process wastewater containing organic pollutants of cutting oil / surfactant but not containing metal particles. Effective is unknown

Method used

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  • Processing method for process waste water from preparation of silicon wafer
  • Processing method for process waste water from preparation of silicon wafer
  • Processing method for process waste water from preparation of silicon wafer

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0031] Example 1: Process test to meet the wastewater discharge process (process wastewater from Plant A)

[0032] 1. Test data of individual aerobic biological system (activated sludge system)

[0033] Wastewater source: Wastewater from the solar wafer slicing / polishing process in Plant A, the BOD / COD of the wastewater is about 5-10%. The test module is only tested with a single aerobic biological system (activated sludge system) and continuous water inlet operation. The original wastewater undergoes a chemical coagulation process to coagulate the particles into colloids, and then undergo solid-liquid separation through the precipitation unit, so that the supernatant is clarified and there are no obvious particles; the supernatant is then introduced into the aerobic biological system to remove organic pollution. The COD influent concentration range of the influent biological system is 993~3812ppm. The operating parameters of the test module, the effluent concentration of the bio...

Embodiment 2

[0043] Example 2: Process test for processing to comply with wastewater discharge (process wastewater from plant B)

[0044] 1. Test data of a single aerobic biological system (fluidized bed biofilm + activated sludge system)

[0045] Wastewater source: Wastewater from the solar wafer grinding slicing / polishing process in Plant B, the wastewater BOD / COD<1%. The module is only tested with a single aerobic biological system (fluidized bed biofilm + activated sludge system) with continuous water inlet operation. The test period lasts for several weeks. The original wastewater undergoes a chemical coagulation process to coagulate the particles into colloids, and then undergo solid-liquid separation through a precipitation unit to clarify the supernatant without obvious particles; the supernatant is then introduced into the aerobic biological system to remove COD pollution. The COD concentration of the influent water of the biological system ranges from 1550 to 2722ppm. Table 3 shows ...

Embodiment 3

[0056] Example 3: Process test to meet wastewater recycling process

[0057] 1. Anaerobic biological system + aerobic biological system (activated sludge system) + membrane biological reaction system test data

[0058] Wastewater source: Wastewater test of solar wafer grinding slicing / polishing process in C factory. The test module is connected in series with anaerobic biological system + aerobic biological system (activated sludge system) + membrane biological reaction system, and is tested by continuous water inlet operation. Raw wastewater properties: COD 1850~2372ppm, SS 200~500mg / L, pH 4.5~7.5. The original wastewater undergoes a chemical coagulation process to coagulate the particles into colloids, and then undergo solid-liquid separation through the precipitation unit, so that the supernatant is clarified without obvious particles (the water quality of the supernatant after coagulation and precipitation: COD 1816~2334ppm (into the biological system) Water COD concentration...

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Abstract

The invention provides a processing method for waste water comprising high concentration particles and organic substances difficult to decompose, such as a processing method for waste water generated during manufacture of a silicon wafer, the processing method comprises steps of separating the particles from the waste water to obtain water substantially containing no particles; processing the substantially non-particle-containing water in a mode of anaerobic microorganism decomposition to make the contained organic substances be partially decomposed to obtain a first part purified water; and processing the first part purified water in the mode of aerobic microorganism decomposition to make the organic substances left therein be further decomposed to obtain a second part purified water, wherein COD removal ratio of the aerobic microorganism decomposition mode is improved by 20-85% compared with the COD removal ratio of the mode not using the anaerobic microorganism decomposition under the same condition.

Description

Technical field [0001] The invention relates to a method for treating waste water containing high-concentration particles and difficult-to-decompose organic substances, in particular to a method for treating waste water generated during the preparation of silicon wafers. Background technique [0002] As the price of crude oil continues to rise and the problem of environmental and climate change continues to intensify, the development of green alternative energy has become an international consensus. Among them, photovoltaic cells are regarded as the most mature technology and the most industrialized new energy industry. The advanced countries regard it as an important industrial economic revitalization strategy in response to the current financial crisis. From the perspective of new energy, solar photovoltaic is a green alternative energy industry, but from the perspective of resources and environmental protection, specific chemical pollutants are used and discharged in the produ...

Claims

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Application Information

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IPC IPC(8): C02F9/14
CPCY02W10/37
Inventor 陈秋美
Owner 陈秋美