Auxiliary device for preparing thin film electrode

Abstract

The invention discloses an auxiliary device for preparing a thin film electrode, which comprises a chassis. The chassis is provided with a supporting end face for supporting a mask plate and a substrate which are overlaid up and down; a pressing mechanism for applying a pressing force for pressing toward the substrate to the mask plate is also arranged on the chassis; and the pressing mechanism comprises a pressure clamp for being pressed on the mask plate and a position control screw which is screwed into the chassis by screw threads after passing downward through the pressing clamp so as to fixedly connect the pressing plate and the chassis. The mask plate can be tightly pressed by the pressing clamp by screwing the position control screw so as to control the pressing degree of the mask plate and the substrate and ensure the mask plate to be sufficiently and tightly contacted with the substrate, thereby avoiding the phenomena of bonding of electrode points and nonuniform thickness of the thin film electrode in the preparation process of the thin film electrode and providing powerful guarantee for preparing the high-quality thin film electrode.

Description

technical field [0001] The invention relates to a preparation process of a thin film electrode, in particular to an auxiliary device capable of adjusting the degree of close contact between a mask plate and a substrate. Background technique [0002] At present, the known thin-film electrode preparation method is to place a mask directly on the substrate, and then obtain the thin-film electrode required for the experiment through a thin-film preparation process. Although this method is simple and easy to implement, because the contact between the mask plate and the substrate is not close, there will be electrode point adhesion and uneven thickness of the film electrode during the growth process of the film electrode. Such results will seriously affect Stability of thin film device performance. Contents of the invention [0003] The object of the present invention is to provide an auxiliary device for preparing thin-film electrodes, which is used to solve the problem of inh...

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Problems solved by technology

[0003] The purpose of the present invention is to provide an auxiliary device for preparing thin film electrodes, which is used to solve the problem that the thin film electrodes prepared are not uniform due to the loose contact between the mask plate and the substrate in the existing thin film electrode preparation process.

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