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Prebaking device and exhaust method of prebaking device

An exhaust method and pre-baking technology, applied in lighting and heating equipment, drying, dryers, etc., can solve the problems of inconvenience, high energy consumption of hot air system, and multi-equipment cost input, and achieve low equipment and energy consumption. cost, the effect of providing product yield, and simplifying equipment maintenance

Active Publication Date: 2012-10-03
BOE TECH GRP CO LTD +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Although this method has a better effect in removing sublimates, it requires more investment in equipment costs (such as pipelines and heating units), and the hot air system consumes a lot of energy (electric energy and gas) and there will be some problems during daily equipment maintenance. great inconvenience

Method used

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  • Prebaking device and exhaust method of prebaking device
  • Prebaking device and exhaust method of prebaking device
  • Prebaking device and exhaust method of prebaking device

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Embodiment Construction

[0041] In the pre-baking process of the prior art, a hot air system is used to obtain a dry clean air source (CDA), and the gas source is used to exhaust during the pre-baking process. In order to save the cost input of the hot air system, the embodiment of the present invention improves the structure of the pre-drying equipment, and uses fillers to filter moisture and dust in the air, so that the air in the clean room can be directly used for exhaust during the pre-drying process. Therefore, equipment costs and maintenance costs can be saved, and the exhaust effect in the pre-baking process can be improved at a lower cost.

[0042] In order to make the objectives, technical solutions and advantages of the present invention clearer, the present invention will be described in detail below with reference to the accompanying drawings and specific embodiments.

[0043] The pre-baking equipment provided by the embodiment of the present invention is applied to drying a substrate, and the...

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Abstract

The invention provides a prebaking device and an exhaust method of the prebaking device, wherein, the prebaking device is structurally improved, and gas is dried and filtered by fillers, so that external gas can be directly used as an exhaust source for exhausting in the prebaking process, therefore, an additional hot-air system is not needed, and the exhaust effect in the prebaking process can be improved with relatively low cost.

Description

Technical field [0001] The invention relates to the technical field of pre-baking treatment in the production process of a substrate, and in particular to a pre-baking equipment and an exhaust method thereof. Background technique [0002] In the thin film transistor liquid crystal display (TFT-LCD) color filter (CF, Color Filter) process, the pre-baking equipment is usually set downstream of the coating machine, and its main function is to further remove the solvent for coating the photoresist and enhance the photoresist Adhesion to the substrate prevents defects caused by film shedding due to insufficient adhesion in the exposed area during development. When the pre-drying equipment is processing, organic sublimates will be generated inside the cavity, which will cause the increase of particles in the internal cavity and affect the product quality. Therefore, it is necessary to exhaust the cavity during processing. In order to improve product yield and facilitate equipment main...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G03F7/38H01L21/67
CPCF26B25/06G03F7/38F26B21/06
Inventor 曹旭东李性照尹冬冬李坤华新孝吴利峰李超王文须
Owner BOE TECH GRP CO LTD