Molecular sieve regeneration method and equipment

A molecular sieve and adsorption tower technology, applied in the field of silane purification process, can solve the problems of explosive mixture, hidden dangers of personnel and equipment safety, small molecular size, etc., and achieve the effect of avoiding hydrogen impurities, saving regeneration cost, and simplifying regeneration process.

Inactive Publication Date: 2012-10-10
FINE SILICON
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Problems solved by technology

[0007] Second, hydrogen is less safe
Hydrogen is chemically active, its molecular size is small, and it is easy to leak. If it leaks, it will form an explosive mixture, which will cause safety hazards to personnel and equipment.
[0008] Third, the cost of hydrogen is high
After the replacement with nitrogen, it needs to be regenerated with hydrogen, which increases the cost of regenerated molecular sieves

Method used

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  • Molecular sieve regeneration method and equipment
  • Molecular sieve regeneration method and equipment

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Embodiment Construction

[0034] The core of the present invention is to provide a molecular sieve regeneration method. The design of the regeneration method can simplify the regeneration process and avoid bringing hydrogen impurities on the one hand, and can ensure safety and reduce regeneration costs on the other hand. In addition, another core of the present invention is to provide a molecular sieve regeneration device.

[0035] In order to enable those skilled in the art to better understand the technical solutions of the present invention, the present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments.

[0036] First, explain the technical terms used in the present invention.

[0037] 1. Molecular sieve: the adsorption material for ethylene in silane, the type is 4A molecular sieve;

[0038] 2. Adsorption tower: equipment filled with molecular sieves.

[0039] 3. Regeneration: After the molecular sieve adsorbs impurity ethyl...

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Abstract

The invention discloses a molecular sieve regeneration method, which is applicable to a silane purification process. The molecular sieve regeneration method comprises the following steps of: closing a silane inlet valve and a silane outlet valve of an adsorption tower (1); displacing silane in the adsorption tower (1) by nitrogen; and starting a heater (2) when maintaining nitrogen transmission, and desorbing silane impurities on a molecular sieve in the adsorption tower (1) by heated nitrogen. According to the design of the regeneration method disclosed by the invention, on one hand, the regeneration process can be simplified, and nitrogen impurities are avoided, on the other hand, the safety is guaranteed, and the regeneration cost is reduced. In addition, the invention also discloses molecular sieve regeneration equipment.

Description

technical field [0001] The invention relates to the technical field of silane purification technology, in particular to a molecular sieve regeneration method. In addition, the present invention also relates to a molecular sieve regeneration device. Background technique [0002] Silane still contains a small amount of impurities after passing through a series of rectification equipment, which need to be further removed by molecular sieves, and electronic grade silanes can be obtained after adsorption and removal of impurities by molecular sieves. When the molecular sieve adsorbs impurities to a certain extent, the adsorption function decreases, and the molecular sieve needs to be regenerated off-line. [0003] In the prior art, there are generally two methods for molecular sieve regeneration. The first one, the patent No. "201110255542.X" and the patent name "A Process for Using Product Nitrogen to Participate in the Regeneration of Molecular Sieve Adsorbers" provides a pro...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B01J20/34B01D53/02
Inventor 桑艳青耿金成许宝辉史东旭
Owner FINE SILICON
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