Molecular sieve regeneration method and equipment

Abstract

The invention discloses a molecular sieve regeneration method, which is applicable to a silane purification process. The molecular sieve regeneration method comprises the following steps of: closing a silane inlet valve and a silane outlet valve of an adsorption tower (1); displacing silane in the adsorption tower (1) by nitrogen; and starting a heater (2) when maintaining nitrogen transmission, and desorbing silane impurities on a molecular sieve in the adsorption tower (1) by heated nitrogen. According to the design of the regeneration method disclosed by the invention, on one hand, the regeneration process can be simplified, and nitrogen impurities are avoided, on the other hand, the safety is guaranteed, and the regeneration cost is reduced. In addition, the invention also discloses molecular sieve regeneration equipment.

Description

technical field [0001] The invention relates to the technical field of silane purification technology, in particular to a molecular sieve regeneration method. In addition, the present invention also relates to a molecular sieve regeneration device. Background technique [0002] Silane still contains a small amount of impurities after passing through a series of rectification equipment, which need to be further removed by molecular sieves, and electronic grade silanes can be obtained after adsorption and removal of impurities by molecular sieves. When the molecular sieve adsorbs impurities to a certain extent, the adsorption function decreases, and the molecular sieve needs to be regenerated off-line. [0003] In the prior art, there are generally two methods for molecular sieve regeneration. The first one, the patent No. "201110255542.X" and the patent name "A Process for Using Product Nitrogen to Participate in the Regeneration of Molecular Sieve Adsorbers" provides a pro...

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Problems solved by technology

[0007] Second, hydrogen is less safe

Hydrogen is chemically active, its molecular size is small, and it is easy to leak. If it leaks, it will form an explosive mixture, which will cause safety hazards to personnel and equipment.

[0008] Third, the cost of hydrogen is high

After the replacement with nitrogen, it needs to be regenerated with hydrogen, which increases the cost of regenerated molecular sieves

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