Dual-gas-supply inflation system applied to vacuum coating equipment and inflation method of system

Abstract

The invention relates to the technical field of coating processes, and mainly relates to a dual-gas-supply inflation system applied to vacuum coating equipment and an inflation method of the system. The inflation system comprises an inlet / outlet chamber, and the side wall of the inlet / outlet chamber is provided with vacuum detecting elements which are composed of five pneumatic butterfly valves BV1-BV5, two filtration mufflers, a dry compressed gas tank and a gas buffer board. The elements are connected by using stainless steel pipes, the BV1 is connected in parallel with the BV2 and then is connected in series with the BV5 and the dry compressed gas tank so as to form a Y-shaped inflation structure, the dry compressed gas tank is arranged at the lower part of the Y-shaped inflation structure, and the two filtration mufflers after respectively connected in series with the BV3 and the BV4, and as branches, are connected to the two sides of the Y-shaped inflation structure and between the BV1 and the BV2 as well as the BV5. The gas buffer board is arranged at the top of the inside of the inlet / outlet chamber. According to the invention, the water vapor entering the vacuum chamber can be reduced, and the vacuumizing speed of the chamber can be accelerated; the environment adaptability of coating equipment is improved, and the coating quality is improved; and the inflation system is simple in structure, and easy to install and remove.

Description

[technical field] [0001] The invention relates to the technical field of coating technology, and mainly relates to a dual gas source inflation system for vacuum coating equipment and an inflation method thereof. [Background technique] [0002] Vacuum coating mainly refers to a type of coating that needs to be carried out under a relatively high vacuum. The substrate that needs to be coated is called the substrate, and the material to be coated is called the target. The substrate and the target are in the same vacuum chamber. The process flow of vacuum coating is generally as follows: after loading the workpiece into the vacuum coating device, close the chamber of the vacuum coating device and exhaust to high vacuum, then fill in the working gas for vacuum coating, after completing the coating process, fill the chamber with One atmospheric pressure, so that the vacuum state returns to the atmospheric state, and then the chamber is opened to take out the workpiece, and the cyc...

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Problems solved by technology

However, the traditional inflating device in the prior art is a filter muffler connected to the inlet / outlet chamber, and the inlet / outlet chamber is directly inflated by the outside air through the filter muffler. This kind of inflator has certain limitations in use, and it is only suitable for drying For the humid atmospheric environment in some places or periods, the inlet / outlet chamber will be filled with humid air, which will affect the acquisition of high vacuum degree, prolong the vacuuming time, and affect the coating quality, which is not safe and reliable. Poor environmental adaptability of coating equipment

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