Reading circuit of infrared focal plane array detector
An array detector and infrared focal plane technology, applied in the field of infrared focal plane array detectors, can solve the problem that the non-uniformity correction effect of the readout circuit is not very good, etc.
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[0023] In the embodiment of the present invention, the infrared focal plane array detector is an infrared focal plane detector based on a microbolometer, and the detecting unit in the detector is a microbolometer. That is, in this embodiment, the infrared focal plane detector includes a microbolometer array, and the microbolometer array constitutes a detection unit array of the infrared focal plane detector.
[0024] Usually, each microbolometer has a cantilever beam microbridge structure fabricated by micromachining technology. The bridge deck of the microbridge is deposited with a layer of heat-sensitive material with a high temperature coefficient of resistance (TCR). The bridge deck is usually composed of two A bridge leg with good mechanical properties and plated with conductive material is supported, and the contact point between the bridge leg and the substrate is a bridge pier, and the bridge pier is electrically connected to a readout circuit of a microbolometer. Thro...
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