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Method for making waveguide by using laser

A laser and waveguide technology, applied in the field of photonic information, can solve the problems of smaller refractive index and inability to form a waveguide to guide light, etc., and achieve the effect of reduced waveguide loss, flexible adjustment, and convenient adjustment

Inactive Publication Date: 2012-10-17
XI'AN INST OF OPTICS & FINE MECHANICS - CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
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Problems solved by technology

In the transparent medium and crystal doped with metal ions, a strong stress is usually generated to cause the expansion of the material, and the result is that the refractive index becomes smaller, so a single scanning track cannot form a waveguide light

Method used

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  • Method for making waveguide by using laser
  • Method for making waveguide by using laser

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Embodiment Construction

[0029] see figure 1 , figure 2 , the present invention proposes a method for making a waveguide with a laser, comprising the following steps:

[0030] 1) Expand the laser beam emitted by the laser through the collimation system;

[0031] 2) The expanded laser passes through the 1 / 2λ wave plate;

[0032] 3) The emitted laser light in step 2) is focused by a microscope objective lens to form a writing laser light;

[0033] 4) Applying the writing laser to the optical sample for trace scanning to form a waveguide, the specific steps of step 4) are:

[0034] 4.1) Place the optical sample on the three-dimensional control platform;

[0035] 4.2) Move the three-dimensional control platform so that the optical sample on the three-dimensional control platform and the writing laser are perpendicular to each other;

[0036] 4.3) Move the three-dimensional control platform laterally, so that the writing laser scans the first waveguide 1 on the optical sample;

[0037] 4.4) Repeat s...

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Abstract

The invention provides a method for making waveguide by using laser. The method comprises the following steps: 1) carrying out beam expansion on laser emitted by a laser device; 2) passing the laser subjected to beam expansion through a 1 / 2gama wave plate; 3) focusing the emitted laser in the step 2) to form carved laser; and 4) acting the carved laser on an optical sample for trace scanning so as to form the waveguide. For the method for making the waveguide by using the laser, a double-line photoetching method is adopted to etch two traces with reduced refraction, positive refractive rate change can be generated in an area between the two traces as the two traces select proper space and photoetching parameters, thus realizing the formation of the waveguide.

Description

technical field [0001] The invention relates to the field of photon information, in particular to a method for making a waveguide by laser. Background technique [0002] Optical waveguide is the most basic unit of photonic chip to realize the control function. The optical waveguide network constitutes a photonic chip, which has the same advantages as electronic chips: high integration, high reliability, low power consumption and low cost. Its application and value in various aspects such as optical communication and laser, and the use of near-infrared ultrashort pulse laser to fabricate three-dimensional waveguides in various glasses and optical crystals has attracted extensive attention since it was first reported in 1996. The technology has little selectivity to materials and has wider application prospects. Moreover, the cross-section of the waveguide is easy to control, which is very beneficial to reduce the insertion loss of the device. Due to its small size and simpl...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B6/13G03F7/20
Inventor 程光华赵卫白晶张挺
Owner XI'AN INST OF OPTICS & FINE MECHANICS - CHINESE ACAD OF SCI
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