Novel fractal PGS (Program Generation System) structure
A fractal and new technology, applied in the direction of electrical components, electrical solid devices, circuits, etc., can solve the problems of substrate energy loss, reduce the L value of the inductor coil, reduce the Q value of the inductor/transformer, etc., to reduce the area and increase the operating frequency , Increase the effect of the slow wave factor
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[0022] The present invention will be further described below in conjunction with accompanying drawing.
[0023] figure 1 It is a schematic plan view of an embodiment in which the first-order H-shaped fractal ground shielding (PGS) structure of the present invention is applied to an inductor. As shown in the figure, the inductor line 11 is made of a top metal layer located on a semiconductor substrate 10 (such as a silicon substrate). The inductor wires 12a and 12b are wound from the second top metal of the semiconductor substrate 10, the inductor wires 11 and 12 are separated by air, and S is the distance between the metal coils. In the central part of the inductor is an H-shaped first-order PGS basic unit 13 made of an underlying metal layer. The construction details of the basic unit 13: first select a center point, construct the horizontal metal strip with the length L and the width W in the middle of the H figure, the starting point is -L / 2, -W / 2, and the end point is L / 2...
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