Magnetic suspension flat motor with primary structure on both sides
A planar motor and magnetic levitation technology, applied in electrical components, holding devices with magnetic attraction or thrust, etc., can solve the problems of low positioning accuracy and complex structure of permanent magnet synchronous planar motors, and achieve less heat generation, lighter weight of the mover, Avoiding the effect of reducing precision
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specific Embodiment approach 1
[0055] Specific implementation mode one: the following combination figure 1 Describe this embodiment, the bilateral primary structure magnetic levitation planar motor described in this embodiment, it comprises primary upper substrate 1, primary lower substrate 2, secondary substrate 3, horizontal force output motor unit and Z direction force output motor unit,
[0056] The primary upper substrate 1, the primary lower substrate 2 and the secondary substrate 3 are all hexagonal flat plates formed by connecting end to end with three equal-length long sides and three equal-length short sides, and the secondary substrate 3 is located on the primary upper substrate. 1 and the primary lower substrate 2, and there is a uniform air gap between the secondary substrate 3 and the primary upper substrate 1, and there is a uniform air gap between the secondary substrate 3 and the primary lower substrate 2,
[0057] There are three horizontal force output motor units and Z direction force o...
specific Embodiment approach 2
[0064] Specific implementation mode two: the following combination figure 2 Describe this embodiment, the bilateral primary structure magnetic levitation planar motor described in this embodiment, it comprises primary upper substrate 1, primary lower substrate 2, secondary substrate 3, horizontal force output motor unit and Z direction force output motor unit,
[0065] The primary upper substrate 1, the primary lower substrate 2, and the secondary substrate 3 are all rectangular, and the primary upper substrate 1, the secondary substrate 3, and the primary lower substrate 2 are placed relatively in parallel in sequence, and the upper surface of the primary upper substrate 1 and the secondary substrate 3 Form an air gap between them, and form an air gap between the lower surface of the secondary substrate 3 and the primary lower substrate 2,
[0066] There are four horizontal force output motor units and Z direction force output motor units,
[0067] Each horizontal force out...
specific Embodiment approach 3
[0073] Specific implementation mode three: the following combination image 3 , Figure 4 , Figure 11 with Figure 12 This embodiment is described. This embodiment is a further description of Embodiment 1 or 2. The bilateral primary structure magnetic levitation planar motor described in this embodiment, the horizontal force upper primary of the horizontal force output motor unit is composed of a horizontal force upper primary coil 4 -1 and the primary iron core 4-2 on the horizontal force. The coil 4-1 is pasted on the air gap side surface of the primary iron core 4-2 on the horizontal force, and the arc section at one end of the primary coil 4-1 on the horizontal force is located in the middle of the outer edge of the primary upper substrate 1;
[0074] The horizontal force upper secondary of the horizontal force output motor unit is composed of the horizontal force upper secondary permanent magnet 4-3 and the horizontal force upper secondary permanent magnet fixing plat...
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