Susceptor for supporting a semiconductor wafer and method for depositing a layer on a front side of a semiconductor wafer
A semiconductor and deposition layer technology, applied in semiconductor/solid-state device manufacturing, chemical instruments and methods, coatings, etc., to achieve the effect of small radial size
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
Embodiment Construction
[0028] according to figure 1 The reactor comprises a chamber with an upper dome 1 , a lower dome 2 and side walls 3 . The upper dome 1 and the lower dome 2 are transparent to the thermal radiation emitted by the radiant heating system arranged above and below the chamber. The layer is deposited from the gas phase on the front side of the semiconductor wafer 4 by directing a process gas over the heated semiconductor wafer's front side and in the process reacting with the exposed front side surface to form the layer. Front side refers to the side of the semiconductor wafer on which the layers are deposited. Typically the polished side of a semiconductor wafer. The process gas is fed in through the gas inlet in the side wall of the chamber, and the waste gas remaining after the reaction is discharged through the gas outlet in the side wall of the chamber. Embodiments of chambers with one further gas inlet and one further gas outlet are known. These embodiments are employed, f...
PUM
Abstract
Description
Claims
Application Information
- R&D Engineer
- R&D Manager
- IP Professional
- Industry Leading Data Capabilities
- Powerful AI technology
- Patent DNA Extraction
Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.
© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com