Online evaluation method for performance parameter of wafer-level single-pivot capacitive accelerometer

Abstract

The invention relates to an online evaluation method for a performance parameter of a wafer-level single-pivot capacitive accelerometer. The online evaluation method comprises a charge amplifying unit, a detecting circuit unit, a low-pass filter unit, a PID (proportion integration differentiation) control unit, a summation amplifier unit and two paths of forward and reverse amplifiers; the charge amplifying unit is connected with the single-pivot capacitive accelerometer through a probe card; the detecting circuit unit is connected with the charge amplifying unit; the low-pass filter unit is connected with the charge amplifying unit; the PID control unit is connected with the low-pass filter unit; the summation amplifier unit is connected with the PID control unit; the output end is connected with a low-frequency frequency spectrum analyzer; the two paths of forward and reverse amplifiers are connected to the summation amplifier unit, and the two output ends are respectively connected with pole plates at the two sides of the pivot of the single-pivot capacitive accelerometer. The online evaluation method is fast and convenient; adjustment and evaluation of the performance parameter of the single-pivot capacitive accelerometer can be achieved by changing the parameters in the circuit; the online evaluation method is high in reliability and adapts to the requirements in production and engineering processes.

Description

technical field [0001] The invention relates to a device for online evaluation and debugging of the performance parameters of a wafer-level single fulcrum capacitive accelerometer. Background technique [0002] For the on-line evaluation of the performance parameters of the single pivot capacitive accelerometer, the wafer-level test is of great significance to the detection and evaluation of the performance parameters of this type of accelerometer, and is an important part of the engineering mass production. At present, there are device-level performance parameter debugging methods at home and abroad, but not for wafer level. The application number is WO00 / 55652, and the patent application titled "Calibration of sensors" discloses the calibration of the sensitivity of each sensitive axis of a multi-axis sensor, and stores the calibration parameters in EEPROM, but this method does not realize the characteristics of gain and temperature. Adjust online. A domestic document ti...

AI Technical Summary

Problems solved by technology

[0003] The online calibration and evaluation methods of the above-mentioned accelerometers, first of all, failed to realize the online calibration and setting of the gain characteristics; secondly, they were all aimed at the evaluation of the device level, and did not realize the test evaluation of the MEMS wafer level; again, the traditional wafer level The performance parameter debugging and evaluation method must fix the parameters when designing, and the method is relatively mechanical, which cannot be debugged online, and does not have strong flexibility

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