Motion parameter measuring system calibration method and motion parameter measuring system based on position sensitive sensor

Abstract

Disclosed is a motion parameter measuring system calibration method based on a position sensitive sensor. The method includes the following steps that (1) an effective detection area of the position sensitive sensor is determined; (2) a plurality of pairs of symmetry points which rotate relative to the center are selected on a near plane and a distant plane of the position sensitive sensor respectively to serve as sampling points, wherein the near plane and the distant plane refer to farthest end plane and nearest end plane of the effective detection area of the position sensitive sensor respectively along the axial direction; and (3) each light source for calibration is sequentially disposed at a position of one sampling point, the position coordinate of each sampling point is recorded, the output coordinate of each light source disposed at the position on the position sensitive sensor is recorded as well, and the corresponding relationship between the position coordinates and the output coordinates is established to form a calibration database. The calibration method has the advantages that the degree of automation is high, and a system can be used for performing an accurate three-dimensional measurement for positions of different depths after the calibration. Simultaneously the invention further provides a motion parameter measuring system based on the position sensitive sensor.

Description

technical field [0001] The invention belongs to the field of measurement technology, in particular to a calibration method for a motion parameter measurement system based on a position sensitive detector (Position Sensitive Detector, PSD). The invention also relates to a motion parameter measurement system based on a position sensitive sensor. Background technique [0002] Position Sensitive Detector (PSD) is a detector based on the transverse photoelectric effect, which is mostly used for position measurement of optical signals. For the two-dimensional PSD used in the motion parameter measurement system, a pair of output electrodes are respectively installed at both ends of the x and y directions. When the light from the measured object is incident on the photosensitive surface of the PSD, the four electrodes will output photocurrent, and the coordinates of the light spot can be calculated according to the four current values. After being processed by the PSD processing c...

AI Technical Summary

Problems solved by technology

At the same time, as a two-dimensional optical position sensor, PSD can sense the position of a larger two-dimensional space after adding an optical projection system, but in an actual system where the position of the main surface of the optical system is unknown, it is impossible to use a single detection Axial distance, calculate the relationship between the device output signal and the actual space position coordinates

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