Contact Probes and Probe Units
A probe unit, probe technology, applied in the direction of connection, electrical components, parts of the connection device, etc., can solve the problems of poor conduction and increased inductance, and achieve the effect of reliable conduction
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Embodiment approach 1
[0030] figure 1 It is a perspective view showing the structure of the probe unit according to Embodiment 1 of the present invention. figure 1 The probe unit 1 shown is a device used when conducting electrical characteristic inspection of a conductive integrated circuit 100 as an inspection object, and is an electrical connection between the semiconductor integrated circuit 100 and a circuit board 200 that outputs inspection signals to the semiconductor integrated circuit 100 . connected device.
[0031] The probe unit 1 has: contact probes 2 (hereinafter, simply referred to as "probes") with conductivity that are in contact with two different semiconductor integrated circuits 100 and circuit boards 200 as contacted bodies at both ends in the longitudinal direction. 2"); a probe holder 3 for accommodating and holding a plurality of probes 2 according to a prescribed pattern; a position of the semiconductor integrated circuit 100 that is placed around the probe holder 3 and sup...
Embodiment approach 2
[0050] Figure 4 It is a partial sectional view showing the structure of the main part of the probe unit according to Embodiment 2 of the present invention. It should be noted that, in figure 1 The same reference numerals are assigned to the same constituent elements as those of the probe unit 1 described above. Figure 4 The illustrated probe 5 is held by a probe holder 6 and is also formed of a conductive material as in the first embodiment. Probe 5 equipped: in progress figure 1 The first plunger 21 (first contact member) that contacts the connection electrode of the semiconductor integrated circuit 100 during the inspection of the semiconductor integrated circuit 100 shown; the second plunger that contacts the electrode of the circuit board 200 equipped with the inspection circuit. 51 (second contact member); the coil spring 23 provided between the first plunger 21 and the second plunger 51 so as to be able to flexibly connect the two first plunger 21 and the second plu...
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