Secondary-electron emission angle distribution testing system
A technology of secondary electron emission and secondary electrons, which is applied in the direction of material analysis, measurement device, and material analysis using wave/particle radiation, which can solve the problem that the processing technology of position-sensitive detectors is difficult to realize, and the physical structure and electronic system are complicated. , the influence of test data accuracy, etc., to achieve the effect of improving test efficiency, low secondary electron emission coefficient, and low production cost
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
Embodiment Construction
[0028] See attached figure 1 , a secondary electron emission angular distribution testing system, which includes: electron gun 1, Faraday cup 2, lifting device 3, secondary electron collection ring, insulating ring 8, sample holder 9, electrometer and vacuum system 11;
[0029] The electron gun 1, Faraday cup 2, lifting device 3, secondary electron collection ring, insulating ring 8 and sample holder 9 are installed inside the vacuum system 11; the electrometer is installed outside the vacuum system 11;
[0030] The electron gun 1 is used to generate an incident electron beam;
[0031] The Faraday cage 2 is installed on the lifting device 3;
[0032] The sample holder 9 is used to place the test sample, so that the incident electron beam generated by the electron gun 1 is horizontally directed to the test sample;
[0033] The quantity of the secondary electron collection ring is 4, and the shape of the secondary electron collection ring is a ring, which is placed between the...
PUM
Property | Measurement | Unit |
---|---|---|
thickness | aaaaa | aaaaa |
Abstract
Description
Claims
Application Information
- R&D Engineer
- R&D Manager
- IP Professional
- Industry Leading Data Capabilities
- Powerful AI technology
- Patent DNA Extraction
Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.
© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com