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Secondary-electron emission angle distribution testing system

A technology of secondary electron emission and secondary electrons, which is applied in the direction of material analysis, measurement device, and material analysis using wave/particle radiation, which can solve the problem that the processing technology of position-sensitive detectors is difficult to realize, and the physical structure and electronic system are complicated. , the influence of test data accuracy, etc., to achieve the effect of improving test efficiency, low secondary electron emission coefficient, and low production cost

Active Publication Date: 2014-11-05
NO 510 INST THE FIFTH RES INST OFCHINA AEROSPAE SCI & TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The disadvantage of this method is that the processing technology of the position sensitive detector is not easy to realize, the physical structure and electronic system are complex, and the production cost is high. Noise, which has a greater impact on the accuracy of the test data

Method used

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Embodiment Construction

[0028] See attached figure 1 , a secondary electron emission angular distribution testing system, which includes: electron gun 1, Faraday cup 2, lifting device 3, secondary electron collection ring, insulating ring 8, sample holder 9, electrometer and vacuum system 11;

[0029] The electron gun 1, Faraday cup 2, lifting device 3, secondary electron collection ring, insulating ring 8 and sample holder 9 are installed inside the vacuum system 11; the electrometer is installed outside the vacuum system 11;

[0030] The electron gun 1 is used to generate an incident electron beam;

[0031] The Faraday cage 2 is installed on the lifting device 3;

[0032] The sample holder 9 is used to place the test sample, so that the incident electron beam generated by the electron gun 1 is horizontally directed to the test sample;

[0033] The quantity of the secondary electron collection ring is 4, and the shape of the secondary electron collection ring is a ring, which is placed between the...

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Abstract

The invention belongs to the technical field of vacuum measurement, and particularly relates to a secondary-electron emission angle distribution testing system. The secondary-electron emission angle distribution testing system is characterized by comprising an electronic gun (1), a faraday cylinder (2), a lifting device (3), a secondary-electron collecting and insulating ring (8), a sample stand (9), an electrometer and a vacuum system (11), wherein the electronic gun (1), the faraday cylinder (2), the lifting device (3), the secondary-electron collecting and insulating ring (8) and the sample stand (9) are arranged in the vacuum system (11); and the electrometer is arranged outside the vacuum system (11). The secondary-electron emission angle distribution testing system disclosed by the invention has the advantages of simple physical structure, lower manufacturing cost, convenience for realization, higher anti-interference property, suitability for the testing of secondary-electron emission angle distribution in the secondary-electron characterization factor testing process of a material, and the like.

Description

technical field [0001] The invention belongs to the technical field of vacuum measurement, and in particular relates to a test system for secondary electron emission angle distribution. Background technique [0002] The secondary electron emission properties of materials play an important role in industrial production and scientific research. In the process of charging and discharging the surface of the spacecraft, the secondary electron emission characteristics of the surface material determine its charging rate and equilibrium potential, which is an important parameter affecting the charging and discharging effect of the spacecraft surface; at the same time, the secondary electron emission characteristics of the material have a great influence on the local charging of the high-voltage tube. Effect, research on the secondary electron resonance effect of ultra-high frequency tubes and the micro-discharge effect of microwave components is of great significance. [0003] The ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N23/225
Inventor 陈益峰李存惠李得天秦晓刚杨生胜史亮王俊柳青汤道坦
Owner NO 510 INST THE FIFTH RES INST OFCHINA AEROSPAE SCI & TECH
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