Method and apparatus for thermal insulation of microreactors

A technology of microreactors and equipment, applied in chemical instruments and methods, heating or cooling equipment, laboratory containers, etc., to achieve the effect of maintaining robustness and minimizing heat dissipation

Active Publication Date: 2018-10-23
INTERUNIVERSITAIR MICRO ELECTRONICS CENT (IMEC VZW) +2
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The downside is that the method of making the device faces the problem of handling the wafer being perforated
Furthermore, the described method does not allow complex adiabatic trench geometries without compromising the mechanical robustness of the device

Method used

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  • Method and apparatus for thermal insulation of microreactors
  • Method and apparatus for thermal insulation of microreactors
  • Method and apparatus for thermal insulation of microreactors

Examples

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Embodiment Construction

[0053] While the present invention will be described with respect to particular embodiments and with reference to certain drawings, the invention is not limited thereto but only by the claims.

[0054] Furthermore, the terms first, second, etc. are used in the description and claims to distinguish between similar elements, and not necessarily to describe a sequential order in time, space or any other representation. It is to be understood that the terms so used are interchangeable under appropriate circumstances and that the embodiments of the invention described herein are capable of operation in other sequences than described or illustrated herein.

[0055] In addition, the terms "top", "under" and the like in the specification and claims are used for the purpose of description, and they are not necessarily used to describe relative positions. It is to be understood that the terms so used are interchangeable under appropriate circumstances and that the embodiments of the inv...

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Abstract

The invention relates to a method and equipment for thermal insulation of a microreactor. The invention provides a microfluidic device (104), comprising: - a semiconductor substrate; - at least one microreactor (105) in said semiconductor substrate; - connected to said semiconductor substrate in said semiconductor substrate one or more microfluidic channels (101) of said at least one microreactor (105); layer (106); and - at least one through-substrate trench (100) surrounding said at least one microreactor (105) and said one or more microfluidic channels (101).

Description

technical field [0001] The present invention relates to the thermal properties of microstructures on microchips. More specifically, the present invention relates to thermal insulation of microreactors on a microchip and methods of manufacturing the same. Background technique [0002] A microreactor, also called a microstructured reactor or a microchannel reactor, is a device in which chemical reactions take place within confines of typically a few millimeters or less in lateral dimension. Microreactors are cavities of microscopic size that feature a system for controlling their temperature based on heaters and thermometers, optionally integrated into the microreactor itself. Microreactors offer many advantages over traditional weighed reactors, including energy efficiency, reaction speed and throughput, safety, reliability, scalability, on-site / on-demand production, a finer degree of process control, and reduced reaction Great improvement in the consumption of goods. [0...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B01J19/00
CPCB01L3/502707B01L3/502715B01L7/52B01L2200/147B01L2300/0816B01L2300/1805B01L2300/1883B81B3/0081B81B7/0087B81B2201/051
Inventor B·琼斯P·费奥里尼田中浩之
Owner INTERUNIVERSITAIR MICRO ELECTRONICS CENT (IMEC VZW)
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