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On-line microwave frequency detector and its detection method based on cantilever beam and direct power sensor

A technology of power sensor and microwave frequency, which is applied in the direction of frequency measurement device, frequency to phase shift conversion, etc., can solve the problem that microwave signal frequency detection cannot be detected online, and achieve the effect of novel structure, easy integration and easy measurement

Inactive Publication Date: 2015-09-30
SOUTHEAST UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] The problem to be solved by the present invention is: the existing microwave signal frequency detection has the disadvantage that it cannot be detected online, and the user needs a microwave frequency detector with a simple structure, a small volume and an online detection

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  • On-line microwave frequency detector and its detection method based on cantilever beam and direct power sensor
  • On-line microwave frequency detector and its detection method based on cantilever beam and direct power sensor
  • On-line microwave frequency detector and its detection method based on cantilever beam and direct power sensor

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Embodiment Construction

[0017] The present invention is fabricated on a GaAs substrate 1, on which there are coplanar waveguide CPW transmission lines, four MEMS cantilever beam structures with identical structures, a power combiner and three MEMS direct microwave power sensors with identical structures. As the signal transmission line of the frequency detector of the present invention, the CPW transmission line is used for the transmission of the microwave signal to be measured, and the transmission of the signal between the MEMS cantilever beam structure, the power combiner and the MEMS direct microwave power sensor. The CPW transmission line is composed of the signal line and the ground line composition.

[0018] The four MEMS cantilever beams with identical structures are located above the insulating dielectric layer 6 on the signal line 2 of the signal transmission line to be tested. When the microwave signal to be tested passes through the signal transmission line to be tested, two cantilever b...

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Abstract

The invention discloses an online microwave frequency detector and a detecting method thereof based on a cantilever beam and a direct-type power sensor. The detector is prepared on a GaAs substrate and comprises coplanar waveguide (CPW) transmission lines, four micro-electromechanical system (MEMS) cantilever beam structures of the completely same structure, a power combiner and three MEMS direct-type microwave power sensors of the completely same structure. The micro-electronic mechanical online microwave frequency detector provided by the invention not only has the advantages of being novel in structure and smaller in size, but also can realize online detection on a microwave signal frequency, and can be compatible with a GaAs single wafer microwave integrated circuit.

Description

technical field [0001] The invention belongs to the technical field of micro-electromechanical systems (MEMS), and relates to an on-line microwave frequency detector based on a cantilever beam and a direct power sensor and a detection method thereof. Background technique [0002] In the research of microwave technology, amplitude, phase and frequency are the three basic parameters that characterize microwave signals. Among them, frequency plays a very important role in the research of microwave signals. Frequency is used in military defense, commercial communication and scientific research. Detector. The design of the microwave frequency detector mainly adopts the principles of heterodyne method, counting method and resonance method. The outstanding advantages are high precision and wide frequency band. However, the structure is usually complicated and the online detection of microwave frequency cannot be realized. With the continuous development of science and technology, ...

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01R23/12
Inventor 廖小平易真翔杨国
Owner SOUTHEAST UNIV