Compact type full spectrum optical measuring head device used for reflection difference spectral measurement

A reflective differential spectroscopy, compact technology, which is applied in the field of precision testing technology and surface optical characterization, can solve the problems of inability to obtain small-sized light spots, weaken the mobile performance of equipment, and different refractive indices, so as to compress the peripheral space and promote The balance of spectral light intensity and the effect of enhancing reflectivity

Active Publication Date: 2015-01-07
TIANJIN UNIV
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Problems solved by technology

The large-volume optical probe not only weakens the mobile performance of the device, but also limits the application of the device for online testing on the vacuum chamber to a certain extent.
[0004] Early compact optical probes used a convex lens to converge the input beam. Since the input beam has a wide spectral range, but the refractive index of the convex lens is different for different wavelengths of light, resulting in serious beam dispersion, and it is impossible to obtain a small spot on the surface of the test sample.

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  • Compact type full spectrum optical measuring head device used for reflection difference spectral measurement

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Embodiment Construction

[0021] The present invention will be further described in detail below in combination with specific embodiments.

[0022] As shown in the accompanying drawings, the present invention is a compact full-spectrum optical measuring head device for reflective differential spectrum measurement, including an incident optical fiber 1, an off-axis parabolic mirror 2, a polarizer 3, a rotary compensator 6, and a polarizer device 10, a first concave mirror 12, a second concave mirror 13 and an outgoing optical fiber 14. The off-axis angle of the off-axis parabolic mirror 2 is one of 90 degrees, 60 degrees, 45 degrees and 30 degrees. The polarizer 3 and the polarizer 10 are respectively installed on a respective rotating platform, and each rotating platform is respectively connected with a stepping motor. The rotary compensator 6 includes an achromatic wave plate installed on a rotary table, and the rotary table consists of a DC continuous motor 8, a transmission belt 7, an angle sensor ...

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Abstract

The invention discloses a compact type full spectrum optical measuring head device used for reflection difference spectral measurement. The compact type full spectrum optical measuring head device used for the reflection difference spectral measurement comprises an incoming optical fiber, an off-axis parabolic reflector, a polarizer, a rotation compensator, a polarization analyzer, a first concave reflector, a second concave reflector and an outgoing optical fiber. An optical source enters through the incoming optical fiber and is transformed to a parallel or a converged light beam through the off-axis parabolic reflector. The parallel or the converged light beam is transformed to linear polarized light through the polarizer and signal modulation is carried out on the linear polarized light through the rotation compensator, and the modulated light irradiates on the surface of a test sample. After the light reflected through the test sample becomes the linear polarized light, the linear polarized light is converged on the inlet of the outgoing optical fiber after being reflected through the first concave reflector and the second concave reflector. A centre line included angle of a back and forth light beam formed between the off-axis parabolic reflector and the first concave reflector is smaller than 4 degrees. The compact type full spectrum optical measuring head device used for the reflection difference spectral measurement is small in size, light in weight, convenient to adjust, reliable in performance and capable of being used for on-line detection in the ultravacuum environment.

Description

technical field [0001] The invention relates to the field of precision testing technology and the field of surface optical characterization, in particular to an optical measuring device using reflection differential spectroscopy technology. Background technique [0002] Reflectance differential spectroscopy is an optical measurement technique with high sensitivity to surface optical anisotropy, which is widely used in scientific research and industrial production fields such as monitoring the growth and preparation of ultra-thin coatings, and analyzing the nanostructure of semiconductor surfaces. This technology analyzes the physical properties of the surface of an object or the interface between substances by detecting the change in the polarization state of polarized light after it passes through the surface of the test sample. It has the characteristics of non-contact, non-destructive measurement, and no special requirements for the measurement environment. [0003] The t...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01J3/42G01J3/02
Inventor 胡春光徐臻圆张一帆谢鹏飞傅星胡小唐
Owner TIANJIN UNIV
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