Power supply system

Abstract

The invention relates to a power supply system which comprises a power supply device, and a cooling device, wherein the power supply device is used for providing direct current power supply for a semiconductor device, a power supply module is arranged inside the power supply device, and air heated by the heat produced by the power supply module when the power supply module works is in the power supply device, the cooling device is arranged on the power supply device, the cooling device comprises a first channel and a second channel which is contacted with the first channel to conduct heat exchange, external cooling liquid in circular flow is filled in the second channel, the first channel and the power supply device are communicated with each other to form an air circulating loop, the air flows in circle in the air circulating loop under the effect of a circulating unit, the heated air flows to the first channel through the power supply device, and heat is transmitted to the cooling liquid in the second channel. After the air is cooled, the air flows back to the power supply device, so that cooling for the power supply module is achieved, and the heated air is prevented from being discharged to a clean room.

Description

technical field [0001] The invention relates to a power supply device for providing DC power to semiconductor equipment, in particular to a power supply system. Background technique [0002] Semiconductor equipment in the clean room, such as metal-organic chemical vapor deposition (Metal-organic Chemical Vapor Deposition, referred to as MOCVD) and other equipment, requires a special power supply unit to provide DC power, and the power supply unit has a high-power DC power supply module , the power module will generate a large amount of heat energy during operation and cause the temperature of the power module to rise. If the temperature of the power module is too high, the working efficiency of the power module will be reduced or even the power module will be burned. In order to ensure that the power module can work normally, the power module has its own cooling fan, and the function of the cooling fan is to draw cooling gas into the power module (the cooling gas is the gas ...

AI Technical Summary

Problems solved by technology

[0003] A large amount of heated gas discharged from the power supply device will add a lot of burden to the air conditioning system of the clean room, so the capacity of the air conditioning system needs to be increased, resulting in an increase in the cost of the air conditioning system; usually the clean room requires a constant temperature within a certain temperature range However, a large amount of heated gas discharged from the power supply device destroys the constant temperature environment in some parts of the clean room, which has a negative impact on the process preparation of semiconductors

[0004] Therefore, how to provide a cooling technology for the power supply unit of semiconductor equipment, to reduce or eliminate the problem of destroying the constant temperature environment of the clean room in the prior art, has become a technology that those skilled in the art need to solve

Images