Micro-electro-mechanical system (MEMS) micro accelerometer closed loop drive circuit using chopping technique

Abstract

The invention relates to a micro-electro-mechanical system (MEMS) micro accelerometer closed loop drive circuit using a chopping technique. The circuit comprises an MEMS micro accelerometer circuit, wherein an output end of the MEMS micro accelerometer circuit is connected with a complementary metal-oxide-semiconductor transistor (CMOS) reading circuit, and the CMOS reading circuit is connected with a drive end of the MEMS micro accelerometer circuit through a feedback drive circuit to provide drive voltage of the MEMS micro accelerometer circuit. The CMOS reading circuit comprises a modulator used for receiving output signals of the MEMS micro accelerometer circuit, wherein an output end of the modulator is connected with an amplifier, an output end of the amplifier is connected with a band pass filter, an output end of the band pass filter is connected with a demodulator, and an output end of the demodulator is connected with a low pass filter. The circuit can reduce electricity noise and detuning of the circuit, meanwhile amplifies signals of an MEMS sensor, provides the drive circuit for an MEMS micro accelerometer, has self-adaptation performance, and is free of an external circuit for driving the MEMS micro accelerometer.

Description

technical field [0001] The invention relates to a closed-loop driving circuit, in particular to a MEMS micro-accelerometer closed-loop driving circuit using chopping technology, and belongs to the technical field of fusion design of MEMS technology and CMOS technology. Background technique [0002] MEMS (Micro-Electro-MechanicalSystems) technology is a hot field in the development of today's IC industry, in which devices represented by micro-accelerometers have been applied in many ways, but traditional MEMS technology still faces many technical problems, among which Technologies such as weak signals, incompatibility with CMOS processes, and shifts in resonance frequencies have become the main limiting factors for current development. Contents of the invention [0003] The purpose of the present invention is to overcome the deficiencies in the prior art, to provide a MEMS micro-accelerometer closed-loop drive circuit using chopping technology, which has a compact structure...

AI Technical Summary

Problems solved by technology

[0002]MEMS (Micro-Electro-MechanicalSystems) technology is a hot field in the development of the IC industry today, and devices represented by micro-accelerometers have been applied in many ways , but the traditional MEMS technology still faces many technical problems, among which weak signal, incompatibility with CMOS technology and shift of resonance frequency have become the main limiting factors of current development.

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