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Microwave detection system and detection method thereof based on clamped beams and direct-type power sensors

A technology of power sensor and microwave detection, which is applied in the direction of electric power measurement by thermal method, frequency measurement device, etc., can solve the problem that microwave signal detection cannot be systematically integrated with frequency detection and power detection, and achieve the effect of novel structure and easy measurement

Inactive Publication Date: 2013-05-22
SOUTHEAST UNIV
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Problems solved by technology

[0003] The problem to be solved by the present invention is: the existing microwave signal detection cannot be systematically integrated with frequency detection and power detection, and users need a microwave frequency and power detector with simple structure, small volume and online detection

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  • Microwave detection system and detection method thereof based on clamped beams and direct-type power sensors
  • Microwave detection system and detection method thereof based on clamped beams and direct-type power sensors
  • Microwave detection system and detection method thereof based on clamped beams and direct-type power sensors

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Embodiment Construction

[0020] Such as figure 1 , the present invention includes a MEMS reconfigurable antenna, a MEMS tunable filter, a control circuit, and a microwave detector. The MEMS reconfigurable antenna receives a microwave signal, and after passing through the MEMS tunable filter, the microwave signal to be tested is obtained and input to the microwave detector. The control circuit is respectively connected with the MEMS reconfigurable antenna and the MEMS tunable filter. The present invention is fabricated on a GaAs substrate 1, and the microwave detector includes a coplanar waveguide CPW transmission line, two MEMS fixed beam structures with the same structure, a power combiner and four MEMS direct microwave power sensors with the same structure. As the signal transmission line of the frequency detector of the present invention, the CPW transmission line is used for the transmission of the microwave signal to be measured, and the transmission of the signal between the MEMS fixed beam stru...

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Abstract

The invention discloses a microwave detection system and a detection method of the microwave detection system based on clamped beams and direct-type power sensors. The microwave detection system comprises a micro-electromechanical system (MEMS) reconfigurable antenna, an MEMS adjustable filter, a control circuit and a microwave detector, wherein the microwave detector is prepared on a GaAs substrate and comprises a coplanar waveguide (CPW) transmission line, two micro-electromechanical system (MEMS) clamped beam structures in the same structure, a power combiner, and four MEMS direct-type microwave power sensors in the same structure. The microwave frequency and power detection system based on the clamped beams and the direct-type power sensors not only has the advantages of being novel in structure and small in size, but also is capable of achieving the integration of microwave signal frequency detection and microwave signal power detection, and is compatible with a GaAS monolithic microwave integrated circuit.

Description

technical field [0001] The invention belongs to the technical field of micro-electromechanical systems (MEMS), and relates to an on-line microwave frequency detector and a detection method based on fixed beams and direct power sensors. Background technique [0002] In microwave technology research, microwave power and frequency are two important parameters that characterize microwave signal characteristics. The detection of these two parameters has become an important part of electromagnetic measurement. Detectors of microwave signal frequency and power are widely used in military affairs, personal communications and scientific research. The existing microwave frequency detection technology is mainly based on heterodyne method, counting method, resonance method and phase comparison method, and the microwave power detection technology is mainly based on the method of diode, thermocouple and thermistor. Although these detection technologies have been formed, their disadvanta...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01R23/02G01R21/02
Inventor 廖小平易真翔吴昊
Owner SOUTHEAST UNIV
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