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X-ray waveguide and X-ray waveguide system

An X-ray and waveguide technology, applied in the field of X-ray waveguide, can solve the problem of not being spatially uniform

Inactive Publication Date: 2013-06-05
CANON KK
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In other words, the direction of propagation of X-rays can be bent, but the phase of X-rays propagating through the capillary is not spatially uniform in the plane perpendicular to the length direction of the capillary

Method used

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  • X-ray waveguide and X-ray waveguide system

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Embodiment Construction

[0022] Embodiments of the present invention are described in detail below.

[0023] An X-ray waveguide according to an embodiment includes a core configured to guide X-rays therethrough, and a cladding configured to confine the X-rays within the core. The core has a periodic structure in which a plurality of substances each having a different real part of the refractive index are periodically arranged in a direction perpendicular to the X-ray guiding direction. The critical angle of total reflection of X-rays at the interface between the core and the cladding is larger than the Bragg angle of periodic X-rays attributable to the periodic structure of the core. The critical angle of total reflection at the interface between the various substances constituting the periodic structure is smaller than the Bragg angle of periodic X-rays attributable to the periodic structure of the core. The core contains a curved portion, and satisfies the following equation (1):

[0024] ...

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Abstract

The invention relates to an X-ray waveguide and an X-ray waveguide system. The X-ray waveguide includes a core having a curved portion and a cladding . The core has a periodic structure that substances each having a different real part of refractive index are periodically arrayed perpendicularly to a guiding direction. A critical angle for the total reflection at a core-cladding interface is larger than a Bragg angle attributable to the periodic structure for an X-ray. A critical angle for the total reflection at a substance interface in the periodic structure is smaller than the Bragg angle. Following formula is satisfied: where s is a core width in direction perpendicular to the guiding direction and parallel to a curvature radius of the curved portion, n low is a refractive-index real part of the substance having a minimum real part, n high is a refractive-index real part of the substance having a maximum real part thereof, and R is the curvature radius.

Description

technical field [0001] The invention relates to an X-ray waveguide, and an X-ray waveguide system comprising an X-ray source and an X-ray waveguide. An X-ray waveguide according to an embodiment of the present invention can be used, for example, in an X-ray optical system, and can further be used as an X-ray optical component used in an X-ray optical system for, for example, X-ray analysis technology, X-ray imaging technology and X-ray exposure technology. Background technique [0002] Electromagnetic waves having short wavelengths of several tens of nm or less, such as X-rays, exhibit very small differences in refractive index between different substances. As a result, the critical angle of total reflection at the interface between different substances is very small for electromagnetic waves having such a short wavelength. Controlling electromagnetic waves with short wavelengths is more difficult than controlling electromagnetic waves in, for example, the visible light ba...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G21K1/06
CPCG21K1/062G21K2201/061G21K1/06
Inventor 冈本康平髙本笃史宫田浩克野间敬
Owner CANON KK