MEMS (micro electronic mechanical system) optical scanning probe

An optical scanning and photoelectric technology, applied in the field of MEMS optical scanning probes, can solve the problems of unfavorable cavity side wall scanning, unfavorable organ tissue scanning, etc., and achieve the effects of compact and simple overall structure, increased assembly flexibility, and low production cost

Active Publication Date: 2013-06-12
无锡微文半导体科技有限公司
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Problems solved by technology

[0005] Considering comprehensively, the above two probes with different working modes have their own advantages, but both have certain limitations. The side-scanning optical probe is not conducive to the scanning of organs and tissues, and the forward-scanning optical probe is not conducive to the scanning of the side wall of the cavity.

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  • MEMS (micro electronic mechanical system) optical scanning probe
  • MEMS (micro electronic mechanical system) optical scanning probe
  • MEMS (micro electronic mechanical system) optical scanning probe

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Embodiment Construction

[0037] The technical solutions of the present invention will be further described below through specific embodiments.

[0038] figure 1 It is a sectional view of a side scanning MEMS optical probe in the prior art. like figure 1 As shown, the optical probe includes a circuit board 11 , a lens 12 , a side window 13 , a MEMS micromirror 14 and a base 15 . The circuit board 11 is arranged on the base 15 , the lens 12 is installed above the circuit board 11 , the MEMS micromirror 14 is installed on the base 15 , and its position is opposite to the end of the lens 12 . The side window 13 is opened on the side of the base 15 . The MEMS optical probe with this structure can realize lateral scanning work, and its side window 13 can be aligned with the sample for optical scanning during endoscopic imaging, which is especially suitable for scanning diagnosis of the side wall of the cavity. And the MEMS optical probe has the advantage of low cost.

[0039] figure 2 It is a section...

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Abstract

The invention discloses a lateral and forward scanning optical probe based on an MEMS (micro electronic mechanical system) and a realization method of the lateral and forward scanning optical probe. A base, an optical fiber and a lens are arranged in an outer tube, the optical fiber and the lens are arranged on the base, an MEMS micromirror A or a reflector A is arranged in front of the base, a reflector B or an MEMS micromirror B is arranged in front of the lens, in addition, an obtuse angle is formed between a lens axis and a mirror surface of the MEMS micromirror B or the reflector B, the foremost end of the outer tube is provided with a window, and the window is in a preset angle with the axial direction of the outer tube. The MEMS optical scanning probe has the advantages that the lateral scanning imaging can be realized on the side walls of tissue samples, the scanning imaging on sequestered tissues or internal organs of human bodies can also be realized, meanwhile, the functions of the lateral scanning probe and the forward scanning probe are considered, and the lateral and forward scanning can be realized.

Description

technical field [0001] The invention relates to the field of optical and electronic circuit design of a micro-electromechanical system, and more specifically relates to a MEMS optical scanning probe. Background technique [0002] At present, a method commonly used in the development of endoscopic imaging systems in the field of medical equipment technology is to combine microelectromechanical systems (microelectromechanical systems, MEMS) scanning micromirrors with optical coherence tomography (Optical Coherence Tomography, OCT) technology combined to develop an endoscopic imaging system. [0003] figure 1 It is a low-cost endoscope micro-optical probe disclosed in the prior art. It adopts MEMS micromirror to realize the side scanning work, and can be used for endoscopic imaging by aligning its side window with the sample for optical scanning, especially It is suitable for scanning diagnosis of the side wall of the cavity. [0004] figure 2 It is a kind of MEMS optical ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): A61B1/00G02B26/12G02B23/24
Inventor 傅霖来王东琳谢会开
Owner 无锡微文半导体科技有限公司
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