Infrared phase locking and imaging method and device for surface and subsurface defect detection of optimal element
A technology for subsurface defects and optical components, which is applied in the direction of optical testing defects/defects, etc., can solve the problems of surface and subsurface absorption defects of transparent optical components, weak absorption defects cannot be effectively identified, and low resolution, so as to improve detection Signal-to-noise ratio, high speed, and the effect of improving detection sensitivity
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[0024] see figure 1 , Optical element surface and sub-surface defect detection infrared lock-in imaging device, including a pump light source 1 arranged opposite to the front surface of the optical element 4, and a pump sequentially arranged between the emitting end of the pump light source 1 and the front surface of the optical element 4 The pump beam modulating device 2 and the pump beam shaping processing device 3, the pump light absorbing device 5 arranged opposite to the rear surface of the optical element 4, and the first infrared imaging device 6 arranged opposite to the front surface of the optical element 4 are arranged in order in the first infrared The first infrared filter device 7 and the first infrared detector array 8 at the rear end of the imaging device 7, the second infrared imaging device 9 arranged opposite to the rear surface of the optical element 1, and the second infrared filter arranged at the rear end of the second infrared imaging device 9 in turn The...
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