Device and method for splicing interferometry of cylindricity errors

A cylindricity error and interferometric measurement technology, applied in measurement devices, optical devices, instruments, etc., can solve the problems of low resolution of measurement results, low sampling efficiency, and the accuracy is affected by many environmental factors, and achieves high measurement accuracy. Effects of low measurement accuracy

Inactive Publication Date: 2013-06-26
SHANGHAI UNIV
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Problems solved by technology

However, the cylindricity error measurement uses the laser diffraction method and the part projection image method. The disadvantages are: the measurement accuracy is affected by many environmental factors, and the repeatability of the measurement

Method used

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  • Device and method for splicing interferometry of cylindricity errors
  • Device and method for splicing interferometry of cylindricity errors
  • Device and method for splicing interferometry of cylindricity errors

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Embodiment 1

Embodiment 2

[0037] Example 2: See figure 2 The measurement method of a cylindrical error of the cylindrical error of the present invention is measured by the device of the embodiment one. The measurement step is:

[0038] (1) Determination of the number of sub -pore diameter and the overlapping area parameters: Enter the diameter and height parameters of the tested cylinder 4, according to the effective diameter and F number of the holographic lens (CGH) 3 (that is, the rear focal length and diameter of the diameter (that is, the rear focal length and diameter of the diameterThe ratio of) determine the number of sub -hole diameters of the tested cylindrical 4, the number of sub -pore diameters is 1, 2, 3, and ┅ , Overlapping number, overlapping number is 1, 2, 3, ┅ It

[0039] Circular pore pilot division method: see image 3 and Figure 4 Take the diameter of the cylindrical cylinder for 100mm, the height of 100mm as an example.Facial errors, therefore, according to the principle of 1 / 4 that...

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Abstract

The invention discloses a device and a method for splicing interferometry of cylindricity errors. The device for the splicing interferometry comprises a computer (1), a flat interferometer (2), a computing holographic lens (3), a measured six-dimensional cylinder adjusting mechanism (5) and a six-dimensional computing holographic lens adjusting mechanism (6). The computer (1) is provided with measurement data processing software, and is connected with the flat interferometer (2). The device and the method for the splicing interferometry of the cylindricity errors is characterized in that the computer (1) provided with the measurement data processing software is used for receiving measured data from the flat interferometer (2), splicing the measured data of the aperture of each measured cylinder (4) input by the measurement data processing software according to data analysis and data comparison, and splicing the acquired cylindricity errors of the measured cylinder. With the device for the splicing interferometry, sampled data are high in density and rapid in sampling speed, and speed and measurement accuracy of the splicing interferometry of the cylindricity errors can be improved.

Description

Technical field [0001] The invention involves a cylindrical error of splicing interference measurement devices and methods, which belongs to the geometric measurement technology field of shaft parts. Background technique [0002] Precision shaft parts are an important part of mechanical products.The shape error of the shaft parts directly affects the coordination accuracy of the parts and the positioning accuracy of the turning surface, which will affect the turn precision of the entire machine and equipment.Affects the service life of shaft parts.Therefore, when processing the axis parts can be performed in a timely, accurate, and quantitative metaphysical error to measure the form error of such parts, it can not only provide the necessary quantitative information for ensuring the quality of the product, but also provide reliability for the parts of the parts to analyze the process analysis.The basis for providing decision -making information for improvement of product quality. ...

Claims

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Application Information

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IPC IPC(8): G01B11/24
Inventor 彭军政于瀛洁葛东宝刘均琦陈明仪
Owner SHANGHAI UNIV
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