Boron diffusion furnace tube tail gas treatment method and device

Abstract

The invention discloses a boron diffusion furnace tube tail gas treatment method and a device. The boron diffusion furnace tube tail gas treatment method comprises the following steps of: exhausting a boron tail gas in a furnace tube (10) into a tail gas tube (20); introducing water-carrying gases into the tail gas tube (20), so that the boron tail gas in the tail gas tube (20) is dissolved into the water-carrying gases and is exhausted out of the tail gas tube (20) together with the water-carrying gases. According to the boron diffusion furnace tube tail gas treatment method and device provided by the invention, the treatment speed of boron diffusion furnace tube tail gas can be improved; the maintaining and cleaning times of the boron diffusion furnace tube tail gas part per unit of time is reduced; and the enterprise production cost is lowered.

Description

technical field [0001] The invention relates to the field of boron diffusion furnace tube tail gas treatment, in particular to a boron diffusion furnace tube tail gas treatment method and processing equipment. Background technique [0002] Crystalline silicon solar cells have been widely used in various fields, and their good stability and mature process flow are the basis for their large-scale application. How to further improve efficiency and reduce costs is the basic goal of domestic and foreign technical research. With the development of process technology, N-type crystalline silicon cells are getting more and more attention from the market because of their low cost and high efficiency. Among them, the boron diffusion process (the formation of P / N junctions on the surface of N-type silicon wafers after diffusion) is an important part of the production process. Therefore, ensuring the stability of the boron diffusion process and reducing the production cost of this proce...

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Problems solved by technology

[0003] The main components of boron diffusion tail gas are boron oxide and borosilicate glass. These substances are in the form of white powder. With the progress of the diffusion process, a large amount of white powder will block the tail gas pipe, so that the tail gas cannot be discharged, and the process is terminated.

The current main method is to monitor the air pressure compensation of the furnace tube. The air pressure compensation will become smaller and smaller with the blockage of the exhaust pipe. When the air pressure compensation is low to a certain value, the process will stop, and the exhaust gas part will be manually removed and put into the water tank. Flushing, this also completes the cleaning of the tail gas part, ensuring the stable operation of the process, but this treatment method not only needs to terminate the process, but also increases the maintenance and cleaning frequency of the furnace tube tail gas treatment part, thus increasing the maintenance per unit time The increase in cleaning times and maintenance cleaning times also reduces the utilization rate of equipment, greatly reduces the speed of boron tail gas treatment, and increases the labor costs and maintenance and cleaning costs of enterprises.

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