Monitoring system of standard semiconductor equipment based on organic photo conductor (OPC)

Abstract

The invention provides a monitoring system of standard semiconductor equipment based on an organic photo conductor (OPC). The monitoring system of the semiconductor equipment based on the OPC standard comprises lower computer sets and an upper computer. The lower computer sets are connected with the semiconductor equipment, and used for controlling operation of the semiconductor equipment and monitoring operating state and procedure parameters of the semiconductor equipment. The upper computer is connected with lower computer sets, and used for monitoring and managing the lower computer sets and acquiring state information and procedure parameters of the semiconductor equipment from the lower computer sets, and sending control instructions, a technical formula and technical parameters controlling operation of the semiconductor equipment to the lower computer sets. The monitoring system of the semiconductor equipment based on the OPC standard has the advantages of being safe and reliable, and convenient to operate. Besides, an unified mode is used to real time assess control the lower computer sets of each unit module of the semiconductor equipment, the lower computer sets are integrated, and unified management of each unit module and production dispatching of wafer machining are achieved.

Description

technical field [0001] The invention relates to the technical field of semiconductor equipment control, in particular to a monitoring system for semiconductor equipment based on the OPC standard. Background technique [0002] In order to ensure the safety and reliability of the operation of semiconductor equipment, maximize the operating efficiency of the system, and meet the operating needs of craftsmen, it is urgent to independently develop a set of upper-level monitoring systems that can monitor equipment in real time. At present, there are many ready-made general-purpose configuration software on the market that can be used to build upper-level monitoring system software, such as KingView and WINCC, etc., but there are some problems: [0003] (1) General configuration software is generally expensive; [0004] (2) The interface elements are not rich enough, and there are still some defects in the special processing of process data, which cannot better meet the process re...

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Problems solved by technology

[0003] (1) General configuration software is generally expensive;

[0004] (2) The interface elements are not rich enough, and there are still some defects in the special processing of process data, which cannot better meet the process requirements;

[0005] (3) General configuration software requires users to make further edits according to their own needs, and users have to spend a lot of energy to configure the software before and during use, which is time-consuming and labor-intensive

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