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efem of integrated scheduling system and its scheduling method

A scheduling system, industrial computer technology, applied in the direction of comprehensive factory control, electrical components, comprehensive factory control, etc., can solve the problems of long debugging and development time, cumbersome network structure, heavy development workload, etc., and achieve good secondary development Effect

Active Publication Date: 2015-09-09
SHENYANG SIASUN ROBOT & AUTOMATION
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  • Summary
  • Abstract
  • Description
  • Claims
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AI Technical Summary

Problems solved by technology

The architecture of such three control systems leads to a huge workload for user development, and the cumbersome network architecture leads to a long time for debugging and development of the entire system

Method used

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  • efem of integrated scheduling system and its scheduling method

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Embodiment Construction

[0032] In order to describe the technical content, structural features, achieved objects and effects of the present invention in detail, the following detailed description is given in conjunction with the embodiments and the accompanying drawings.

[0033] see figure 1 The present invention provides an EFEM with an integrated dispatching system, including an integrated dispatching EFEM industrial computer, an atmospheric robot, a pre-alignment module (Aligner), a fan filter module, an Ethernet switch, a DeviceNet bus communication module, and an I / O module. , Field-level equipment and Load Port (automated wafer loading system) group. in,

[0034] The EFEM industrial computer with integrated scheduling is used for the overall scheduling of the EFEM system and the ontology control of the EFEM industrial computer; the EFEM industrial computer with integrated scheduling undertakes the scheduling and control tasks of the process processing workstation (Cluster tools), and controls...

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Abstract

The invention provides an equipment front-end module (EFEM) of an integration scheduling system and a scheduling method of the EFEM. An industrial control computer which exerts a scheduling function in cluster tools is combined with a controller of the EFEM, namely, the controller of the EFEM is replaced by the industrial control computer of the integrated and scheduling EFEM, the EFEM is enabled to be good in secondary development and can conduct teaching, signal configuration and technique process treatment to an atmosphere mechanical hand, a Load Port set, a prealignment module and the like according to concrete requirements in an operation system, and at the same time, bottom layer drives of the atmosphere mechanical hand, the Load Port set, and the prealignment module are nested into the EFEM. Scheduling control is achieved without arrangement and development.

Description

technical field [0001] The invention relates to automatic control equipment and a scheduling method, in particular to an EFEM with an integrated scheduling system and a scheduling method thereof. Background technique [0002] The existing semiconductor processing front-end transfer unit (EFEM-Equipment Frond-End Module) itself includes a control system, which is responsible for the pre-alignment mechanism, atmospheric machine in the semiconductor processing front-end transfer unit (EFEM-Equipment Frond-End Module) Hands, Load Port groups, and devices in the semiconductor processing front-end transmission unit (EFEM-Equipment Frond-End Module) body such as buttons and indicators are scheduled. The process equipment that needs to be connected behind the semiconductor processing front-end transmission unit (EFEM-Equipment Frond-End Module) to form a process processing workstation (Cluster tools), in which the process processing equipment will also have an independent controller...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L21/67G05B19/418
CPCY02P90/02
Inventor 曲道奎徐方贾凯褚明杰刘一恒刘世昌沈德峰陈廷辉
Owner SHENYANG SIASUN ROBOT & AUTOMATION
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