Etching system having many etching modes

Abstract

The invention provides an etching system having many etching modes. The etching system is composed of an etching acid box, a pump, baffle plates, a driving roller way, a water squeezing roller, nozzles and a water tank, and the etching acid box is sequentially connected with the pump and the nozzles through a pipeline; the driving roller way is arranged in the water tank, and the driving roller way is provided with the water squeezing roller, and the driving roller way and the water squeezing roller form an etching solution tank in the water tank; and the baffle plates are fixed at two sides of the periphery of the etching solution tank respectively. The etching system can realize a spray mode, an immersion mode and a spray and etching combined mode, has the characteristics of etching solution concentration stability and small etching solution fluidity, can effectively solve a technologic problem that the large-area uniform etching and high output cannot be realized in present etching technologies, and is very practical.

Description

technical field [0001] The invention relates to an etching system, in particular to an etching system with multiple etching modes. Background technique [0002] TCO (Transparentconductingoxide) glass, that is, transparent conductive oxide coated glass, is a layer of transparent conductive oxide film uniformly coated on the surface of flat glass by physical or chemical coating methods, mainly including oxides of In, Sn, Zn and Cd And its composite multi-element oxide film material. [0003] TCO glass was first used in flat panel displays, and now ITO type conductive glass is still the mainstream glass electrode product in the flat panel display industry. In recent years, the rise in the price of crystalline silicon has greatly promoted the development of thin-film solar cells. At present, thin-film solar cells account for more than 10% of the world's photovoltaic market share. The TCO glass used in photovoltaics is used as a necessary component of the front electrode of the ...

AI Technical Summary

Problems solved by technology

Due to the fast reaction speed between the AZO film and hydrochloric acid, coupled with the high spray pressure, this will lead to poor morphology of the AZO glass produced by the spray process, and it is easy to produce apparent defects such as water lines and over-etching streaks. , affecting the subsequent application of AZO glass on thin film batteries

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