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A mask plate for vapor plating and a production method thereof

A manufacturing process and mask technology, which is applied in vacuum evaporation coating, metal material coating process, sputtering coating and other directions, can solve the problem of inability to manufacture masks with large taper openings, etc., to improve accuracy and position. The effect of precision

Inactive Publication Date: 2013-07-17
KUN SHAN POWER STENCIL
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0011] The purpose of the present invention is to at least solve one of the above-mentioned technical defects, especially solve the problem that it is impossible to make a mask plate with a large tapered opening

Method used

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  • A mask plate for vapor plating and a production method thereof
  • A mask plate for vapor plating and a production method thereof
  • A mask plate for vapor plating and a production method thereof

Examples

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Embodiment Construction

[0033] The embodiments of the present invention will be described in detail below. Examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals indicate the same or similar elements or elements with the same or similar functions. The embodiments described below with reference to the drawings are exemplary, and are only used to explain the present invention, but should not be understood as limiting the present invention.

[0034] In the description of the present invention, it should be understood that the directions or positional relationships indicated by the terms "upper", "lower", "front", "rear", "inner", and "outer" are based on the drawings shown The orientation or positional relationship is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the pointed device or element must have a specific orientation, be constructed and operated in a spe...

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Abstract

The invention discloses a mask plate for vapor plating and a production method thereof, and the production method comprises the following steps of: arranging a substrate; electroforming at least two mask plate layers in order on one surface of the substrate, and each mask plate layer is arranged with openings, and the size of the openings of each mask plate layer is widened along with the distance from the mask plate layer to the substrate. A plurality layers of openings are arranged together to roughly be a cone shape. According to the mask plate for vapor plating and the production method thereof provided by the invention, through electroforming a plurality of mask plate layers, the position accuracy of the mask plate for OLED vapor plating is improved, the opening size accuracy of the mask plate for OLED vapor plating is improved, and the angles of upper and lower openings can be controlled at will to satisfy vapor plating requirements.

Description

[0001] technical field [0002] The invention belongs to the technical field of mask making, and relates to a mask structure, in particular to a mask for evaporation; meanwhile, the invention also relates to a manufacturing process of a mask for evaporation. [0003] Background technique [0004] The organic light emitting display has been paid great attention due to its advantages of wide viewing angle, high contrast ratio, and high response speed. Meanwhile, electroluminescent devices are classified into inorganic electroluminescent devices and organic electroluminescent devices; organic light-emitting devices have higher brightness and response speed than inorganic electroluminescent devices, and can display color images. [0005] An organic electroluminescence display includes an organic electroluminescence device having an anode, an organic material layer, and a cathode respectively stacked on a substrate. The organic material layer includes an organic emission layer ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/04C23C14/24C25D1/10
Inventor 魏志凌高小平赵录军孙倩郑庆靓
Owner KUN SHAN POWER STENCIL
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