Triaxial air bearing table high-precision attitude angle and angular velocity measuring device
A measuring device and technology of an air bearing table, which is applied in the field of measurement, can solve problems such as difficulty in achieving high precision, inapplicability of three-axis air bearing table measurement, and complex mechanisms.
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Embodiment 1
[0040] Example 1: Combining figure 1 , the present invention 1. a kind of three-axis air bearing platform high-precision attitude angle and angular velocity measuring device, comprise laser tracker 1, intelligent probe 2, gyroscope 3, two photoelectric autocollimators 4, four-sided prism 5 and data The processor 6, the laser tracker 1 is installed under the three-axis air flotation table, the intelligent probe 2 is fixed on the instrument platform of the three-axis air flotation table, the intelligent probe 2 has a target positioning system, and the laser tracker 1 cooperates with The intelligent measuring head 2 can track and determine the three-dimensional angle and the moving three-dimensional distance of the intelligent measuring head 2 rotating (usually installed and fixed with the target object to be measured), the gyroscope 3 and the four-sided prism 4 are fixed on the three-axis air bearing table On the instrument platform, two photoelectric autocollimators 4 are ortho...
Embodiment 2
[0050] combine figure 2 , the present invention utilizes the installation relation of two photoelectric autocollimators and prism to do as follows:
[0051] The prism used should be installed on the instrument platform near the outer edge to ensure the field of view. During the experiment, the prism and the instrument platform of the air bearing table move together, the optical axes of the two autocollimators are installed on the base under the stage in an orthogonal relationship, and their light pipes are respectively aligned with the two orthogonal prisms of the prism. On the reflective surface, each autocollimator can measure the two-dimensional attitude information of the prism, and the three-degree-of-freedom attitude angle measurement of the instrument platform can be given according to the measurement data of the two photoelectric autocollimators.
[0052] In addition, the specific value of the "small angle" motion range mentioned above (the typical value is usually ±...
Embodiment 3
[0054] The present invention utilizes the Kalman filter fusion of the laser tracker and the gyroscope to obtain attitude information during large-angle operation, and the specific steps are as follows:
[0055] Step 1: Use the deviation quaternion and gyro drift to form a six-dimensional vector as a non-redundant representation of the filter state, and the measurement equation of the filter can be obtained through the output of the laser tracker. Let the system state equation be as follows:
[0056] X · ( t ) = F ( t ) X ( t ) + ...
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