Manufacturing method for thin film chip antenna and structure of thin film chip antenna
A thin-film chip and manufacturing method technology, which is applied in the field of antennas, can solve the problems of increased cost, slow manufacturing speed, and difficulty in controlling the accuracy of chip antennas, etc.
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
Embodiment Construction
[0120] The technical content and detailed description of the present invention are now described as follows in conjunction with the accompanying drawings:
[0121] see figure 1 , Figure 2a to Figure 2f , a schematic diagram of the fabrication process and structural fabrication process of the first metal layer of the thin film chip antenna of the present invention. As shown in the figure: the manufacture method of the film chip antenna of the present invention, at first, in step 100, the substrate 1 of the Al2O3 of a ceramic material (such as Figure 2a ).
[0122] Step 102 , cleaning the surface of the substrate 1 .
[0123] Step 104, after the substrate 1 is cleaned, a layer of titanium tungsten (TiW) and copper material (such as Figure 2b ) of the metal film 2a.
[0124] Step 106, coating or printing a photoresist layer 10 of a thin film on the surface of the metal film 2a (such as Figure 2c ).
[0125] Step 108, carry out exposure, development processing (as Fig...
PUM
Login to View More Abstract
Description
Claims
Application Information
Login to View More 