Method for packaging organic electronic device
A technology of organic electronic devices and packaging methods, applied in the direction of electric solid devices, electrical components, semiconductor devices, etc., can solve the problems that rigid packaging cannot meet the packaging requirements of flexible devices, and achieve the goal of improving service life, reducing costs, and reducing thermal damage Effect
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[0021] Such as figure 1 As shown, the packaging method of the organic electronic device provided by the present invention is divided into two steps, a pre-process and a post-process.
[0022] The previous process is to deposit a multi-layer composite thin film 3 on the back of the substrate 1 before making the organic electronic device 2 . A multi-layer composite thin film 3 is deposited by plasma enhanced chemical vapor deposition method (hereinafter referred to as PECVD method). The multilayer composite film 3 is composed of several layers of organic layers and inorganic layers alternately stacked. Organic layers are prepared from organic polymers including: parylene, polypropylene, polyacrylate or silicone crosslinked polymer SiO x C y h z . It is used to isolate water and oxygen; the inorganic layer is inorganic, which is used to increase flexibility, bendability and anti-breakage. The inorganic layer is prepared from inorganic substances, including: SiN x , SiO y ...
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