Array type ultra-large aperture planar optical element surface shape detection device and method
An optical element, surface shape detection technology, applied in the direction of using optical devices, measuring devices, instruments, etc., can solve the problems of large size and long debugging time, achieve high price, reduce development costs, and improve surface shape detection accuracy and efficiency. Effect
Inactive Publication Date: 2016-06-08
SOUTHWEAT UNIV OF SCI & TECH
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[0004] Due to the gantry structure, the detection of super-large optical components is huge, and the debugging time in different postures is long, and the detection accuracy is only 1 / 3 wavelength
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[0020] The present invention will be described in detail below in conjunction with specific embodiments.
[0021] Internal structure reference of DVD optical pickup head: Li Ruijun et al., Large-scale and high-precision scanning probe based on DVD optical pickup head, Journal of Hefei University of Technology (Natural Science Edition), 2011, 34(12). The application of the automatic power control circuit is that the laser diode emits a red laser beam with a wavelength of about 0.5mW at 650nm, which is diffracted by a grating to form three beams of detection light, and then passes through a beam splitter and a collimator lens to turn the laser beam into a collimated beam. The straight beam is focused on the emitting surface (such as the optical element under test) after passing through the focusing lens. The light beam reflected by the reflective surface passes through the standard lens, the beam splitter and the cylindrical astigmatic lens along the original optical path, and t...
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The invention discloses a device and method for detecting the surface shape of an array-type extremely-large-diameter plane optical element. The device for detecting the surface shape of the array-type extremely-large-diameter plane optical element comprises a DVD / CD optical pickup array (1) and a constant-current drive subsystem (2), an FES signal acquisition subsystem (3) and a surface shape detection, control and processing subsystem (4) of the optical pickup array, wherein the DVD / CD optical pickup array (1) is used for detecting the surface shape of a detected region, the FES signal acquisition subsystem (3) is used for collecting the altitude difference of the surface shape of the detected region of the DVD / CD optical pickup array (1) in real time, and the surface shape detection, control and processing subsystem (4) is used for conducting signal acquisition and surface shape reconstructing and drawing of the DVD / CD optical pickup array (1). A DVD / CD optical pickup arranged in an array-type mode is adopted to promote the surface shape detection precision and efficiency of surface shape detection equipment. Compared with the background technology that surface shape equipment developed through the method of angle difference testing, the interferometry and the like is expensive and large, the device and method for detecting the surface shape of the array-type extremely-large-diameter plane optical element can greatly reduce development costs of equipment.
Description
technical field [0001] The invention belongs to the field of machine vision technology detection, and mainly relates to a device and method for detecting the surface shape of a super-large-diameter plane optical element. Background technique [0002] Surface technology mainly includes angle difference method, LTP, transient interferometer and Hartmann detection and other methods. The principle of the angle difference method is that the change of the surface shape can be reflected by the change of the normal direction angle of each point. The method of measuring the angle change with high precision can reconstruct the surface shape of the component. Southwest University of Science and Technology has developed a large Caliber optical element surface shape detection device, the detection accuracy reaches 1 / 3 wavelength. LTP uses the principle of thin beam interferometry. If the detected surface is inclined at a certain angle relative to the plane perpendicular to the optical a...
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IPC IPC(8): G01B11/24
Inventor 陈念年巫玲范勇王俊波杨程张劲峰
Owner SOUTHWEAT UNIV OF SCI & TECH