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Esd protection device and method for producing same

A technology of ESD protection and manufacturing method, applied in the direction of static electricity, electrical components, spark gaps, etc., can solve problems such as holes formed in insulating substrates, achieve the effect of improving repeatability and suppressing the rise of discharge start voltage

Active Publication Date: 2013-08-28
MURATA MFG CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In the ESD protection device described in Patent Document 1, a cavity is formed in an insulating substrate

Method used

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  • Esd protection device and method for producing same
  • Esd protection device and method for producing same
  • Esd protection device and method for producing same

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1）

[0076] A Ba-Al-Si-O ceramic composition is prepared and pre-fired at 700-900°C. The obtained calcined powder is pulverized to obtain raw material ceramic powder. A mixed solvent of toluene and alcohol (Japanese: エキネン) was added and mixed to this raw ceramic powder to obtain a ceramic slurry in which a resin binder and a plasticizer were further added. The ceramic slurry thus obtained was formed by a doctor blade method to obtain a ceramic green sheet having a thickness of 50 μm. As described above, a plurality of ceramic green sheets having a thickness of 50 μm were prepared.

[0077] In addition, a ceramic paste for forming the sealing layer 6 was printed to a thickness of 10 μm on one ceramic green sheet, and dried. As the ceramic paste used, a ceramic paste containing Al2O3 was used.

[0078] After drying the above-mentioned ceramic paste, the composite paste for forming the discharge assisting portion 8 is applied and dried. This composite paste is prepared by weighing...

Embodiment 2）

[0086] The ESD protection device 21 in Embodiment Mode 2 was produced. When forming the 1st, 2nd discharge electrode 4,5, similarly to Example 1, the conductive paste was printed multiple times. However, by changing the printing accuracy of the printed pattern, the first and second discharge electrodes 4 and 5 whose tip thicknesses are circular are formed.

[0087] The size of the gap between the tips of the first and second discharge electrodes 4 and 5 was 30 μm. In addition, the thickness of the thickest part of the first and second discharge electrodes 4 and 5 is 30 μm. The dimension of the lowest part of the cavity 3 is 10 μm.

Embodiment 3）

[0089] formed as image 3 The ESD protection device 31 in Embodiment 3 is shown. Here, it is the same as in Example 1 except that the coating thickness of the resin paste for forming the cavity 3 is 20 μm. As a result, as image 3 As shown, it is possible to form a dome-shaped cavity 3 whose top protrudes upward at the center. The distance of the gap between the first and second discharge electrodes was 30 μm. The thickness of the thickest portion of the first and second discharge electrodes was 30 μm. The height of the highest portion at the top at the center of the cavity 3 was 35 μm.

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Abstract

Provided is an ESD protection device wherein, even in the case of repeated electrical discharge, it is difficult for an increase to arise in discharge start voltage and discharge protection voltage, and furthermore it is difficult for scorching or peeling to occur at the tip of a discharge electrode. A cavity (3) is formed within an insulating substrate (2). In the cavity (3), a first and second discharge electrode (4, 5) are disposed in a manner so that the tips (4a, 5a) face each other separated by a gap. A first external electrode (9) is formed at the outer surface of the insulating substrate in a manner so as to be electrically connected to the first discharge electrode (4), and a second external electrode (10) is formed at the outer surface of the insulating substrate (2) in a manner so as to be electrically connected to the second discharge electrode (5). The thickness of the tips (4a, 5a) of the first and second discharge electrodes (4, 5) is relatively thicker than the remaining portion of the first and second discharge electrodes.

Description

technical field [0001] The present invention relates to an ESD protection device for electrostatic protection and a manufacturing method thereof. More specifically, it relates to an ESD protection device having a structure in which discharge electrodes face each other in a cavity provided in an insulating substrate and a manufacturing method thereof. Background technique [0002] Conventionally, various ESD protection devices have been proposed in order to protect electronic devices from ESD (Electro-Static Discharge: electrostatic discharge). [0003] For example, Patent Document 1 below discloses an ESD protection device formed by arranging first and second discharge electrodes in an insulating substrate. In the ESD protection device described in Patent Document 1, a cavity is formed in an insulating substrate. The formed 1st, 2nd discharge electrode is exposed in this cavity, and the front-end|tip is opposed to each other in a cavity. The first discharge electrode is dr...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01T4/12
CPCH01T4/12H05F3/04
Inventor 大坪喜人
Owner MURATA MFG CO LTD
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