Interdigital capacitor accelerometer with uniaxial folding spring beams

Abstract

The invention relates to an interdigital capacitor accelerometer with uniaxial folding spring beams, which comprises a substrate and a structural layer, wherein the structural layer comprises an upper anchor point, a lower anchor point, a left elastic beam, a right elastic beam, a mass block, a left anchor point and a right anchor point, wherein polar plate groups are arranged on the sides, close to the mass block, of the upper and the lower anchor point; each pair of polar plate group comprises a first polar plate and a second polar plate; and third polar plates are arranged on the upper and the lower side of the mass block. The accelerometer is characterized in that each structure of the third polar plates, the left elastic beam, the right elastic beam and the mass block is that a first dielectric layer, a first metal layer, a second dielectric layer, a second metal layer, a third dielectric layer, a third metal layer and a passivation layer are sequentially arranged from the bottom up, the first metal layer and the second metal layer are connected through a first tungsten plug, and the second metal layer and the third metal layer are connected through a second tungsten; a plurality of side walls perpendicular to the substrate are etched on the structural layer; and a suspension structure is arranged on the substrate. The accelerometer provided by the invention is high in sensitivity, low in cost and has improved manufacturability.

Description

Technical field [0001] The invention relates to a single-axis folding spring beam interdigital capacitive accelerometer, in particular to a single-axis folding spring beam interdigital capacitive accelerometer based on CMOS DPTM (Double Poly Triple Metal) mixed signal technology, which belongs to the design and manufacture of MEMS devices Technical field. Background technique [0002] Inertial measurement is a major application aspect of MEMS technology. Integrated inertial sensors have a wide range of applications, including automotive engineering, aviation navigation, consumer electronics and military applications. [0003] Today's mainstream acceleration detection technologies include: capacitance detection technology, piezoresistive detection technology, and tunnel effect current detection technology. Due to the inherent resistance thermal noise and resistance temperature change characteristics, accelerometers based on piezoresistive detection technology have low measurement ...

AI Technical Summary

Problems solved by technology

Therefore, the cost of manufacturing devices is very high, and it is difficult to achieve system integration

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