Helium mass spectrum fine leakage detecting method of multiple helium pressing and prefilled helium pressing

Abstract

The invention discloses a helium mass spectrum fine leakage detecting method of multiple helium pressing and prefilled helium pressing. According to the method, the procedure for helium mass spectrum fine leakage detection by a multiple helium pressing method or a prefilled helium pressing method in a pressed helium or prefilled helium sealing device is given, and the helium pressing duration, the longest detection waiting duration and the measurement leakage rate criterion are particularly given. The method has the beneficial effects that compared with the secondary fine leakage detection by a single helium pressing method, the method is simpler, faster and more precise, and in addition, the error judgment of fine leakage and the leakage detection of large leakage near the rough leakage can be avoided; compared with the twice detection of the first fine leakage detection and the second fine leakage detection after the helium pressing, the method has the advantages that once fine leakage detection is reduced, the testing deviation is reduced, and in addition, the pressure of helium gas pressed by the helium pressing or the pressure of the prefilled helium gas attenuated inside an element to be detected before the helium pressing can be utilized, so the detection is more sensitive; and compared with a method for comparing the measuring leakage rate and the detection waiting time of the first fine leakage detection and the second fine leakage detection after the helium pressing through multiple factors, the method is simpler, more convenient and feasible.

Description

technical field [0001] The invention relates to the field of fine leak detection by helium mass spectrometer for sealing electronic components, in particular to a method for fine leak detection by helium mass spectrometer by multiple pressure helium and pre-filled helium pressure helium. Background technique [0002] At present, fine leak detection by helium mass spectrometry is one of the most commonly used methods for leak detection of sealed electronic components. Many product specifications and acceptance documents stipulate that in the process control of product manufacturing, product delivery inspection, identification and periodic test, and user acceptance, it is necessary to repeatedly perform helium mass spectrometry leak detection on the same batch of samples. At this time, the helium pressure method shall be used for the second detection of the samples for which the helium pressure method or pre-filled helium method is used for the first leak detection. [0003] ...

AI Technical Summary

Problems solved by technology

For the multiple pressure helium method, the criterion for n times of detection may be tightened by n times; for the pre-filled helium pressure helium method, the detection criterion may be tightened several times to several orders of magnitude

In addition, there may be missed detection of large leaks close to gross leaks and misjudgment of fine leaks.

[0004] At the same time, there are also individual standards that stipulate that the measured leak rate should be tested before helium pressure, and the measured leak rate should be tested again after helium pressure, and the increase in the latter measured leak rate should be taken as the actual measured leak rate. This adds a fine leak detection procedure, which will The bias of the two detections is added and the higher detection sensitivity provided by the internal helium partial pressure formed by the pre-filled helium and the previously pressurized helium is lost

[0005] There are also literatures that compare the waiting time and measured leak rate of the previous fine leak detection and the second fine leak detection after helium pressurization with multiple factors to judge whether the sample tightness is qualified, but the judgment procedure and method are quite complicated

Images