magnetic random access memory
A random access memory, magnetic technology, applied in static memory, digital memory information, information storage, etc., can solve problems such as complex structure, achieve the effect of simple structure, improved storage density, and improved energy efficiency
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Embodiment 1
[0039] Example 1 see Figure 2B The structure of the magnetic element is as follows: first, a bottom electrode layer (or seed layer) 4 of Cr10nm / Au50nm is formed on the substrate; then a 0.7nm thick ferromagnetic Co is formed on the bottom electrode layer 20 Fe 80 Free layer (magnetic free layer 1), and the magnetization direction of this layer can be switched under the action of an electric field; one is formed in ferromagnetic Co 20 Fe 80 The isolation layer (non-magnetic isolation layer 2) above the layer, preferably a 1.5nm MgO barrier layer; another magnetic Fe layer (10nm) formed on the isolation layer 2 and one formed on the other magnetic Fe layer The Au (20nm) top electrode layer (or protective layer) 5 on the (magnetic pinned layer 3). The barrier layer 2 allows charge carriers to tunnel between the magnetic free layer 1 and the magnetic fixed layer 3. The thickness of the magnetic free layer must be less than a certain critical thickness to meet the electric field can...
Embodiment 2
[0042] Embodiment 2 In the foregoing embodiment, the equilibrium magnetization direction of the magnetic pinned layer is determined by the in-plane magnetization of the material, and its direction is relatively fixed. However, when the coercive force is small, the magnetization direction can be reversed under a small external field, thereby affecting the performance of the magnetic memory. In view of the above problems, this embodiment further proposes a pinned magnetic element with a structure such as Figure 3A As shown, an artificial antiferromagnetic layer 6 is formed on the magnetic pinned layer 3, and the equilibrium magnetization direction of the magnetic pinned layer 3 is relatively fixed due to the pinning effect of the antiferromagnetic. The materials of the seed layer 4, the lower magnetic free layer 1, the non-magnetic isolation layer 2, the magnetic pinned layer 3, and the protective layer 5 in this embodiment are similar to those of the first embodiment, so their d...
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