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Method and device for producing organic EL element

A manufacturing method and element technology, which are applied in the field of the manufacturing apparatus of the organic EL element, and can solve the problems such as the enlargement of the apparatus and the complicated operation.

Inactive Publication Date: 2013-09-04
NITTO DENKO CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] In addition, in the manufacturing method of Patent Document 1, there are provided a delivery roller for sending out the shadow mask, a take-up roller for taking up the shadow mask, and a plurality of support rollers for supporting the shadow mask, which usually causes the Problems such as device enlargement
In addition, when the vaporized material is to be vapor-deposited on the substrate in a different pattern, there is a problem that complex operations are required to replace (mold replacement) with a predetermined shadow mask.

Method used

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  • Method and device for producing organic EL element
  • Method and device for producing organic EL element
  • Method and device for producing organic EL element

Examples

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Embodiment 1

[0090] An anode layer, an organic EL layer, and a cathode layer were formed on a base material with a production apparatus set to the following conditions, and an organic EL element was produced. For the shielding part, the thickness is 0.1mm, and SUS304 is used as the material. The diameter of the can roll was 600 mm. The vacuum degree of the vacuum chamber is set to 5.0×10 -5 Pa. The width dimension of the substrate is 50 mm. In addition, the conveying speed of the substrate was 1 m / min. The thickness of the substrate is 50 μm, and its material is SUS304. An insulating layer with a thickness of 4 μm was formed on the element side of the substrate.

[0091] Using scissors, the organic EL elements produced under the above-mentioned conditions are cut at the central portion between adjacent organic EL elements in the longitudinal direction of the substrate along the width direction of the substrate, thereby cutting out each organic EL element. , a voltage was applied to t...

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Abstract

A method and a device for producing an organic EL element are provided that make it possible to deposit vaporized material from a vapor deposition source in a desired pattern on a substrate without the need for a conventional band-shaped shadow mask. A shield unit (51) is configured to be switchable between: a shield position for shielding a substrate (81), said position being located between a vapor deposition source (4) and the substrate (81); and a shield release position in which the shield unit is withdrawn from between the vapor deposition source (4) and the substrate (81) so that the substrate (81) is no longer shielded. The shielding unit (51) is switched between the shield position and the shield release position while rotating together with a roller (3).

Description

technical field [0001] The present invention relates to a method for manufacturing an organic EL (electroluminescence) element in which a vaporized vaporized material is vapor-deposited from a vapor deposition source on a strip-shaped substrate. In addition, the present invention also relates to the organic EL element. manufacturing device. Background technique [0002] Conventionally, as a manufacturing method of an organic EL element, there is known a manufacturing method comprising: a step of advancing a strip-shaped substrate in a manner to advance along a predetermined advancing direction; and self-evaporating a vaporized material A process in which a source is ejected and vapor-deposited on a substrate (for example, Patent Document 1). And, according to this manufacturing method, by bringing the surface of the strip-shaped shadow mask into close contact with the strip-shaped substrate so as to overlap the surface of the strip-shaped substrate, and moving the shadow ma...

Claims

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Application Information

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IPC IPC(8): H05B33/10C23C14/24H01L51/50
CPCC23C14/042C23C14/562H10K71/164H05B33/10C23C14/24H10K50/11H10K71/00
Inventor 垣内良平山本悟肥田加奈子
Owner NITTO DENKO CORP
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